A SEM Based Technique To Detect Pin-holes In As-Deposited/As-Grown Dielectrics

Abstract

In this paper, an attempt is made to highlight a new SEM based technique that was used to detect pinholes in the as- deposited/as-grown dielectrics. The fundamental principle governing the technique is discussed. This technique is benchmarked against a well-established fault- isolation technique using the Liquid Crystal. In fact, this technique was found to supplement the Liquid Crystal technique. A case study, discussed in the paper, helps understand the usefulness of the technique especially in detecting defects on as- deposited/as-grown dielectric films.