{"title":"Microlens-integrated vertical-cavity surface-emitting lasers for large-tolerant fiber optic coupling","authors":"Y. Song, K. Chang, Y. T. Lee","doi":"10.1109/ICTONMW.2007.4446980","DOIUrl":null,"url":null,"abstract":"We have fabricated microlens-integrated vertical-cavity surface-emitting lasers (VCSELs) by selective oxidation of composition-graded digital alloy AlGaAs. Microlens-integrated VCSELs with self-aligned structure was fabricated using standard VCSEL processing without additional process steps, due to the simultaneous formation of a microlens and oxide aperture. The output beam from the oxide-buried and oxide-removed AlGaAs microlens-integrated VCSELs has a beam radius of 3.7 mum and 3.5 mum at a distance of about 25 mum and 15 mum, respectively, from the surface of the VCSEL. From the calculation of VCSEL-to-SM fiber coupling efficiency, the oxide-buried lensed-VCSELs exhibited 1-dB axial alignment tolerance range of about 40 mum.","PeriodicalId":366170,"journal":{"name":"2007 ICTON Mediterranean Winter Conference","volume":"2 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2007-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2007 ICTON Mediterranean Winter Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICTONMW.2007.4446980","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
We have fabricated microlens-integrated vertical-cavity surface-emitting lasers (VCSELs) by selective oxidation of composition-graded digital alloy AlGaAs. Microlens-integrated VCSELs with self-aligned structure was fabricated using standard VCSEL processing without additional process steps, due to the simultaneous formation of a microlens and oxide aperture. The output beam from the oxide-buried and oxide-removed AlGaAs microlens-integrated VCSELs has a beam radius of 3.7 mum and 3.5 mum at a distance of about 25 mum and 15 mum, respectively, from the surface of the VCSEL. From the calculation of VCSEL-to-SM fiber coupling efficiency, the oxide-buried lensed-VCSELs exhibited 1-dB axial alignment tolerance range of about 40 mum.
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