Corrosion and Tribo-Corrosion of Hard Coating Prepared by Advanced Magnetron Sputtering

Deen Sun
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Abstract

Hard coatings are widely used in modern manufacturing industry as an abrasion-resistant coating, which helps to improve the wear resistance and corrosion resistance of the workpiece and prolong its service life. However, in most application environment the coatings are subjected simultaneously to both wear and corrosion phenomena, which is termed tribo-corrosion. The conjoint action of wear and corrosion is often more intense than pure corrosion and pure wear effects alone. It is necessary to fabricate coating with excellent resistance against both wear and corrosion and study the tribological behavior under corrosive environment. Recently, an emerging technology, High Power Impulse Magnetron Sputtering (HiPIMS), has gained much interest and become a hot topic of research due to the unique properties it can achieve. In HiPIMS the power is applied to the target in pulses of low duty cycle and frequency to generate ultra-dense plasma that makes it possible to deposit hard, dense, and smooth films, which may help to improve not only mechanical properties but also the anticorrosion ability of hard coatings.
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先进磁控溅射硬质涂层的腐蚀与摩擦腐蚀
硬质涂层作为一种耐磨涂层广泛应用于现代制造业,有助于提高工件的耐磨性和耐腐蚀性,延长其使用寿命。然而,在大多数应用环境中,涂层同时遭受磨损和腐蚀现象,这被称为摩擦腐蚀。磨损和腐蚀的共同作用往往比单纯的腐蚀和单纯的磨损作用更为强烈。因此,有必要制备具有优异耐磨损和耐腐蚀性能的涂层,并研究其在腐蚀环境下的摩擦学性能。近年来,大功率脉冲磁控溅射技术(HiPIMS)以其独特的性能引起了人们的广泛关注,成为研究的热点。在HiPIMS中,功率以低占空比和频率的脉冲作用于目标,产生超致密等离子体,从而可以沉积坚硬、致密和光滑的薄膜,这不仅有助于提高硬涂层的机械性能,还有助于提高其防腐能力。
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