{"title":"Soft X-ray-charged multilayered piezoelectret with embedded electrode for push-button energy harvesting","authors":"Jia Lu, Yuji Suzuki","doi":"10.1109/MEMSYS.2018.8346637","DOIUrl":null,"url":null,"abstract":"In this report, we propose a push-button-type kinetic energy harvester using a soft-X-ray-charged multilayered piezoelectret. With the aid of embedded electrodes, the bias voltage is directly applied to each unit cell. With our 9-layer early prototype, output power of 9.9 μJ has been obtained for 0.75 mm displacement within 0.3 s. d33 as high as 14000 pC/N is realized, which is 10 times higher than that for previous piezoelectrets. Power generation by pushing with a finger has also been demonstrated.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"12 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2018.8346637","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract
In this report, we propose a push-button-type kinetic energy harvester using a soft-X-ray-charged multilayered piezoelectret. With the aid of embedded electrodes, the bias voltage is directly applied to each unit cell. With our 9-layer early prototype, output power of 9.9 μJ has been obtained for 0.75 mm displacement within 0.3 s. d33 as high as 14000 pC/N is realized, which is 10 times higher than that for previous piezoelectrets. Power generation by pushing with a finger has also been demonstrated.
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