Contactless measurement of recombination lifetime in photovoltaic materials

R. Ahrenkiel, S. Johnston
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引用次数: 29

Abstract

Contactless measurement of important semiconductor parameters has become a popular trend of current semiconductor technology. Here we describe an improved version of radio frequency photoconductive decay (RFPCD) operating in the ultra-high frequency (UHF) region. This work shows that the improved technique is capable of measuring samples ranging in size from submicron thin films to large silicon ingots. The UHF region is an ideal compromise for volume penetration and lifetime resolution with system response of 10 ns or less.
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光伏材料复合寿命的非接触测量
半导体重要参数的非接触式测量已成为当前半导体技术的发展趋势。在这里,我们描述了在超高频(UHF)区域工作的射频光导衰减(RFPCD)的改进版本。这项工作表明,改进后的技术能够测量从亚微米薄膜到大硅锭的样品。UHF区域是体积穿透和寿命分辨率的理想折衷,系统响应小于等于10ns。
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