The Accelerometer Utilizing the Transverse Vibration Mode of LGT Piezoelectric Crystal

Abstract

A transverse-vibration-mode piezoelectric accelerometer using La3Ga5.5Ta0.5O14 (LGT) single crystal was designed and fabricated for potential high temperature sensing applications. Dynamic modeling of the accelerometer based on the transverse-vibration-mode of LGT crystal was presented first, followed by crystal cut preparation, sensor design and assembly, experimental setup establishment and sensing test. The prototype of transverse-vibration-mode piezoelectric accelerometer was tested in the temperature range of $20^{\circ}\mathrm{C}\sim 350^{\circ}\mathrm{C}$ under 160Hz. The average sensitivity of the prototype was evaluated to be 3.3 pC/g over the tested temperature range and the linearity reached 1.2%. This work might supply an approach for design and fabrication of new piezoelectric accelerometers using the transverse-vibration-mode of piezoelectric crystal materials.