Innovative XY-theta platform held by a serial redundant arm

J. Brethé, A. Hijazi, D. Lefebvre
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引用次数: 4

Abstract

This paper presents a XV-theta micrometric platform, which is extremely compact and offers a wide 300×300 mm workspace. The novelty is that the platform is hold by a serial kinematic chain of four revolute joints, constituting a redundant robot. Each point of the platform can be positioned under a vertical axis with a final error less than two μm in a two-step approach: in a coarse positioning mode, the four axes are controlled to position and orientate the object with an error less than five μm; in a fine mode, two axes are mechanically blocked while two others are controlled to reduce the final error below two μm. The choice of the blocked and moving axes depend on the lever arm length and the mechanism is designed to optimise the link lengths to reduce the final error.
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创新的XY-theta平台由一系列冗余臂支撑
本文介绍了一个XV-theta微米平台,它非常紧凑,并提供了一个宽阔的300×300 mm工作空间。新颖之处在于,该平台由四个旋转关节组成的串联运动链支撑,构成一个冗余机器人。采用两步法将平台各点定位在垂直轴下,最终误差小于2 μm;采用粗定位方式,控制4个轴对目标进行定位和定向,最终误差小于5 μm;在精细模式下,对两个轴进行机械阻塞,对另外两个轴进行控制,使最终误差减小到2 μm以下。阻塞轴和运动轴的选择取决于杠杆臂的长度,该机构旨在优化连杆长度,以减少最终误差。
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