E. Marigó, J. Munoz-Gamarra, J. Giner, J.L. Lopez, F. Torres, A. Uranga, N. Barniol, J. Verd
{"title":"Linear operation of a 11MHz CMOS-MEMS resonator","authors":"E. Marigó, J. Munoz-Gamarra, J. Giner, J.L. Lopez, F. Torres, A. Uranga, N. Barniol, J. Verd","doi":"10.1109/FREQ.2010.5556351","DOIUrl":null,"url":null,"abstract":"In this work, the characterization of the first lateral in-plane flexural mode DETF (Double Ended Tuning Fork) MEMS resonator integrated monolithically in a CMOS 0.35µm technology is done. This characterization is done with the same resonator stand-alone and with an integrated CMOS amplifier to obtain the handling dynamic range of the applied voltage (dc bias and ac signal) for a linear behavior of the resonator.","PeriodicalId":344989,"journal":{"name":"2010 IEEE International Frequency Control Symposium","volume":"42 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2010 IEEE International Frequency Control Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/FREQ.2010.5556351","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 4
Abstract
In this work, the characterization of the first lateral in-plane flexural mode DETF (Double Ended Tuning Fork) MEMS resonator integrated monolithically in a CMOS 0.35µm technology is done. This characterization is done with the same resonator stand-alone and with an integrated CMOS amplifier to obtain the handling dynamic range of the applied voltage (dc bias and ac signal) for a linear behavior of the resonator.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
