Pub Date : 2010-06-01DOI: 10.1109/FREQ.2010.5556375
P. Tinguy, F. Lardet-Vieudrin, B. Dulmet, J. Leost, L. Couteleau
This paper presents the performances of an integrated oscillator working at 3.3V power supply for XO applications, extended to OCXO by digital selections. It is realized in a standard 0.35µm SiGe BiCMOS technology from austriamicrosystems AG®. Some experimental characterizations have been performed at 40 MHz and give good agreement with simulations. This die is then used to develop a miniaturized XO design on silicon substrate (8.5×8.5 mm2).
本文介绍了一种工作在3.3V电源下的集成振荡器的性能，并通过数字选择扩展到OCXO。它是在奥地利微系统公司的标准0.35 μ m SiGe BiCMOS技术中实现的。在40兆赫下进行了一些实验表征，结果与仿真结果吻合良好。然后使用该模具在硅衬底(8.5×8.5 mm2)上开发小型化XO设计。
{"title":"Toward full crystal oscillator integration for RF applications","authors":"P. Tinguy, F. Lardet-Vieudrin, B. Dulmet, J. Leost, L. Couteleau","doi":"10.1109/FREQ.2010.5556375","DOIUrl":"https://doi.org/10.1109/FREQ.2010.5556375","url":null,"abstract":"This paper presents the performances of an integrated oscillator working at 3.3V power supply for XO applications, extended to OCXO by digital selections. It is realized in a standard 0.35µm SiGe BiCMOS technology from austriamicrosystems AG®. Some experimental characterizations have been performed at 40 MHz and give good agreement with simulations. This die is then used to develop a miniaturized XO design on silicon substrate (8.5×8.5 mm2).","PeriodicalId":344989,"journal":{"name":"2010 IEEE International Frequency Control Symposium","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127381349","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-06-01DOI: 10.1109/FREQ.2010.5556323
P. Zheng, T.-L. Chin, D. Greve, I. Oppenheim, L. Cao
Wired and wireless surface acoustic wave (SAW) sensors with langasite Euler angle (0, 138.5, 27) and (0, 138.5, 117) were fabricated for the purpose of temperature and gas sensing in high temperature combustion process. Their temperature responses were measured in pulse mode both wired to a high-temperature cable and in wireless mode attached to a dipole antenna. The observed surface acoustic wave velocity monotonically decreases above 200 °C with multiple reflections observable in wired measurements up to 900 °C and in wireless mode up to 700 °C. Temperature resolution better than ± 0.5 C was achieved for wired and wireless measurements from 200 °C to 600 °C.
{"title":"Pulse-mode temperature sensing with langasite SAW devices","authors":"P. Zheng, T.-L. Chin, D. Greve, I. Oppenheim, L. Cao","doi":"10.1109/FREQ.2010.5556323","DOIUrl":"https://doi.org/10.1109/FREQ.2010.5556323","url":null,"abstract":"Wired and wireless surface acoustic wave (SAW) sensors with langasite Euler angle (0, 138.5, 27) and (0, 138.5, 117) were fabricated for the purpose of temperature and gas sensing in high temperature combustion process. Their temperature responses were measured in pulse mode both wired to a high-temperature cable and in wireless mode attached to a dipole antenna. The observed surface acoustic wave velocity monotonically decreases above 200 °C with multiple reflections observable in wired measurements up to 900 °C and in wireless mode up to 700 °C. Temperature resolution better than ± 0.5 C was achieved for wired and wireless measurements from 200 °C to 600 °C.","PeriodicalId":344989,"journal":{"name":"2010 IEEE International Frequency Control Symposium","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127453414","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-06-01DOI: 10.1109/FREQ.2010.5556316
Wen-Chien Chen, Ming-Huang Li, W. Fang, Sheng-Shian Li
Integrated CMOS-MEMS free-free beam resonators using pull-in mechanism to surmount the limitation of CMOS minimum feature size and hence achieve deep-submicron electro-to-resonator gap spacing have been demonstrated to overcome Q-degradation and frequency variation caused by modulated boundary conditions, greatly improving resonator Q and at the same time reducing motional impedance to allow direct measurement without the use of readout circuitry. The key to attaining high Q and to stabilizing resonance frequency of resonators is to effectively decouple the pull-in scheme and mechanical boundary conditions of resonators. In this work, CMOS-MEMS resonators with deep-submicron gaps have been measured with motional impedance down to 172kΩ and Q's greater than 2,000. In addition, such a resonator monolithically integrated with CMOS amplifier, totally occupying die area of only 300µm × 130µm, was also tested with enhanced transmission. With such improved performance, this technique may pave a way to realize fully-integrated CMOS-MEMS oscillators, therefore benefitting future single-chip applications.
{"title":"High-q integrated CMOS-MEMS resonators with deep-submicron gaps","authors":"Wen-Chien Chen, Ming-Huang Li, W. Fang, Sheng-Shian Li","doi":"10.1109/FREQ.2010.5556316","DOIUrl":"https://doi.org/10.1109/FREQ.2010.5556316","url":null,"abstract":"Integrated CMOS-MEMS free-free beam resonators using pull-in mechanism to surmount the limitation of CMOS minimum feature size and hence achieve deep-submicron electro-to-resonator gap spacing have been demonstrated to overcome Q-degradation and frequency variation caused by modulated boundary conditions, greatly improving resonator Q and at the same time reducing motional impedance to allow direct measurement without the use of readout circuitry. The key to attaining high Q and to stabilizing resonance frequency of resonators is to effectively decouple the pull-in scheme and mechanical boundary conditions of resonators. In this work, CMOS-MEMS resonators with deep-submicron gaps have been measured with motional impedance down to 172kΩ and Q's greater than 2,000. In addition, such a resonator monolithically integrated with CMOS amplifier, totally occupying die area of only 300µm × 130µm, was also tested with enhanced transmission. With such improved performance, this technique may pave a way to realize fully-integrated CMOS-MEMS oscillators, therefore benefitting future single-chip applications.","PeriodicalId":344989,"journal":{"name":"2010 IEEE International Frequency Control Symposium","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125169270","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-06-01DOI: 10.1109/FREQ.2010.5556264
D. Enzer, Rabi T. Wang, W. Klipstein
Gravity Recovery and Interior Laboratory, or GRAIL, is a NASA mission to map out the gravity field of the moon to an unprecedented level of detail. The instrument for this mission is based on GRACE (Gravity Recovery and Climate Experiment), an earth-orbiting mission currently mapping out the gravity field of the earth. This paper will describe the similarities and differences between these two instruments with a focus on the microwave ranging measurements used to determine the gravity parameters and the testbed built at Jet Propulsion Laboratory to demonstrate micron level ranging capability. The onboard ultrastable oscillator and RF instruments will be described and noise contributions discussed.
{"title":"GRAIL — A microwave ranging instrument to map out the lunar gravity field","authors":"D. Enzer, Rabi T. Wang, W. Klipstein","doi":"10.1109/FREQ.2010.5556264","DOIUrl":"https://doi.org/10.1109/FREQ.2010.5556264","url":null,"abstract":"Gravity Recovery and Interior Laboratory, or GRAIL, is a NASA mission to map out the gravity field of the moon to an unprecedented level of detail. The instrument for this mission is based on GRACE (Gravity Recovery and Climate Experiment), an earth-orbiting mission currently mapping out the gravity field of the earth. This paper will describe the similarities and differences between these two instruments with a focus on the microwave ranging measurements used to determine the gravity parameters and the testbed built at Jet Propulsion Laboratory to demonstrate micron level ranging capability. The onboard ultrastable oscillator and RF instruments will be described and noise contributions discussed.","PeriodicalId":344989,"journal":{"name":"2010 IEEE International Frequency Control Symposium","volume":"20 2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116582970","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-06-01DOI: 10.1109/FREQ.2010.5556268
A. Savchenkov, V. Ilchenko, J. Byrd, W. Liang, D. Eliyahu, A. Matsko, D. Seidel, L. Maleki
We present our recent results related to the development of ultra-compact opto-electronic oscillators based on high-Q whispering gallery mode (WGM) resonators. These oscillators operate in X-, Ku-, and Ka-bands and are able to generate spectrally pure RF signals characterized with less than −120 dBc/Hz phase noise at 100 kHz. The floor of the phase noise (< −140 dBc/Hz) is limited by the shot noise of the signal received at the photodiode. Both tunable and fixed frequency oscillators are demonstrated.
{"title":"Whispering-gallery mode based opto-electronic oscillators","authors":"A. Savchenkov, V. Ilchenko, J. Byrd, W. Liang, D. Eliyahu, A. Matsko, D. Seidel, L. Maleki","doi":"10.1109/FREQ.2010.5556268","DOIUrl":"https://doi.org/10.1109/FREQ.2010.5556268","url":null,"abstract":"We present our recent results related to the development of ultra-compact opto-electronic oscillators based on high-Q whispering gallery mode (WGM) resonators. These oscillators operate in X-, Ku-, and Ka-bands and are able to generate spectrally pure RF signals characterized with less than −120 dBc/Hz phase noise at 100 kHz. The floor of the phase noise (< −140 dBc/Hz) is limited by the shot noise of the signal received at the photodiode. Both tunable and fixed frequency oscillators are demonstrated.","PeriodicalId":344989,"journal":{"name":"2010 IEEE International Frequency Control Symposium","volume":"71 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122587687","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-06-01DOI: 10.1109/FREQ.2010.5556313
J. Giner, A. Uranga, F. Torres, E. Marigó, J.L. Munoz Gamarra, N. Barniol
In this paper a fully integrated CMOS-MEMS filter is presented. The filter is formed by two beams using a V-shaped coupler which allows the in-plane vibrations. The device presents a BW of 1.85MHz for a 29MHz center frequency. The electrical phase inversion mechanism is used in order to obtain the filter response. The device is fabricated using the capacitance module present in the commercial CMOS technology from Austria Micro-systems 0.35 µm.
{"title":"A CMOS-MEMS filter using a V-coupler and electrical phase inversion","authors":"J. Giner, A. Uranga, F. Torres, E. Marigó, J.L. Munoz Gamarra, N. Barniol","doi":"10.1109/FREQ.2010.5556313","DOIUrl":"https://doi.org/10.1109/FREQ.2010.5556313","url":null,"abstract":"In this paper a fully integrated CMOS-MEMS filter is presented. The filter is formed by two beams using a V-shaped coupler which allows the in-plane vibrations. The device presents a BW of 1.85MHz for a 29MHz center frequency. The electrical phase inversion mechanism is used in order to obtain the filter response. The device is fabricated using the capacitance module present in the commercial CMOS technology from Austria Micro-systems 0.35 µm.","PeriodicalId":344989,"journal":{"name":"2010 IEEE International Frequency Control Symposium","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128020755","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-06-01DOI: 10.1109/FREQ.2010.5556254
D. Meiser, Jun Ye, M. Holland
Ultra-stable lasers are core components of many precision measurements and clock experiments. The stability of the most stable lasers is limited by thermal noise of the reference cavities to which the frequency of the laser is locked. Overcoming this limitation is a serious challenge. We discuss an alternative route to ultra-stable light that circumvents the need for an improved reference cavity. The idea is to generate light actively from ultra-cold atoms in a lattice clock. We discuss the physical mechanism underlying this light source, experimental requirements, and key characteristics of the generated light such as its intensity, linewidth, and noise properties.
{"title":"Prospects for milli-hertz linewidth lasers using collective emission","authors":"D. Meiser, Jun Ye, M. Holland","doi":"10.1109/FREQ.2010.5556254","DOIUrl":"https://doi.org/10.1109/FREQ.2010.5556254","url":null,"abstract":"Ultra-stable lasers are core components of many precision measurements and clock experiments. The stability of the most stable lasers is limited by thermal noise of the reference cavities to which the frequency of the laser is locked. Overcoming this limitation is a serious challenge. We discuss an alternative route to ultra-stable light that circumvents the need for an improved reference cavity. The idea is to generate light actively from ultra-cold atoms in a lattice clock. We discuss the physical mechanism underlying this light source, experimental requirements, and key characteristics of the generated light such as its intensity, linewidth, and noise properties.","PeriodicalId":344989,"journal":{"name":"2010 IEEE International Frequency Control Symposium","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130969453","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-06-01DOI: 10.1109/FREQ.2010.5556376
H. Kanie, Yusuke Todo, Yuto Hirota, M. Furukawa, Tasuku Ueno, Kana Tadamatsu
This paper describes analytical and experimental study of a zero-temperature-coefficient square Lamé-mode quartz resonator supported at four nodal points. Comparison of vibration mode shapes of the resonators with and without four supporting beams in the modal analysis using finite element analysis indicated that several contour modes vibrating at large amplitude in the corners with frequency lower than that of the Lamé mode get a boost in frequency by the constraint at the corners and resulted in spurious modes to the Lamé mode by temperature shift. Comparison of mode shapes of these unwanted contour vibrating modes with and without truncation at the corners of the square quartz plate indicated another boost in frequency caused by the reduction in mass where the mode vibrates at large amplitude. Four-corner truncated square quartz resonators supported by four beams were designed and fabricated by wet etching process. Measured data of the fabricated resonators made of LQ1T and LQ2T cut quartz plates indicated a zero temperature coefficient and electrical equivalent circuit parameters comparable to those of a fundamental mode Lamé resonators with two point support.
{"title":"Zero temperature coefficient characteristic of four-corner-truncated square quartz resonator supported at four nodal points in Lamé mode","authors":"H. Kanie, Yusuke Todo, Yuto Hirota, M. Furukawa, Tasuku Ueno, Kana Tadamatsu","doi":"10.1109/FREQ.2010.5556376","DOIUrl":"https://doi.org/10.1109/FREQ.2010.5556376","url":null,"abstract":"This paper describes analytical and experimental study of a zero-temperature-coefficient square Lamé-mode quartz resonator supported at four nodal points. Comparison of vibration mode shapes of the resonators with and without four supporting beams in the modal analysis using finite element analysis indicated that several contour modes vibrating at large amplitude in the corners with frequency lower than that of the Lamé mode get a boost in frequency by the constraint at the corners and resulted in spurious modes to the Lamé mode by temperature shift. Comparison of mode shapes of these unwanted contour vibrating modes with and without truncation at the corners of the square quartz plate indicated another boost in frequency caused by the reduction in mass where the mode vibrates at large amplitude. Four-corner truncated square quartz resonators supported by four beams were designed and fabricated by wet etching process. Measured data of the fabricated resonators made of LQ1T and LQ2T cut quartz plates indicated a zero temperature coefficient and electrical equivalent circuit parameters comparable to those of a fundamental mode Lamé resonators with two point support.","PeriodicalId":344989,"journal":{"name":"2010 IEEE International Frequency Control Symposium","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132439316","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-06-01DOI: 10.1109/FREQ.2010.5556253
R. Lévy, A. Dupret, H. Mathias
The Frequency Tracking Oscillator (FTO) is being more and more used to drive vibrating MEMS sensors resonators (inertial sensors and mass sensors) because of its ability to control the phase shift over the resonator and thus to track the resonance frequency. The goal of this work is to study the FTO phase noise that determines the sensor resolution. First a phase noise model of the FTO is presented, then simulations are performed to quantify the impact of oscillator elements phase noises on the output phase noise. Finally model simulations are compared to experimental phase noise measurements.
{"title":"Phase noise analysis of the Frequency Tracking Oscillator","authors":"R. Lévy, A. Dupret, H. Mathias","doi":"10.1109/FREQ.2010.5556253","DOIUrl":"https://doi.org/10.1109/FREQ.2010.5556253","url":null,"abstract":"The Frequency Tracking Oscillator (FTO) is being more and more used to drive vibrating MEMS sensors resonators (inertial sensors and mass sensors) because of its ability to control the phase shift over the resonator and thus to track the resonance frequency. The goal of this work is to study the FTO phase noise that determines the sensor resolution. First a phase noise model of the FTO is presented, then simulations are performed to quantify the impact of oscillator elements phase noises on the output phase noise. Finally model simulations are compared to experimental phase noise measurements.","PeriodicalId":344989,"journal":{"name":"2010 IEEE International Frequency Control Symposium","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133116155","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-06-01DOI: 10.1109/FREQ.2010.5556244
E. Ivanov, D. Mouneyrac, J. Le Floch, M. Tobar, D. Cros
We developed an effective technique for phase synchronization of a cryogenic microwave oscillator. The achieved quality of phase synchronization is a few milliradians. It enables accurate measurements of extremely weak phase fluctuations expected from the next generation of frequency stabilized microwave oscillators based on the cryogenically cooled sapphire dielectric resonators.
{"title":"Accurate phase synchronization of a cryogenic microwave oscillator","authors":"E. Ivanov, D. Mouneyrac, J. Le Floch, M. Tobar, D. Cros","doi":"10.1109/FREQ.2010.5556244","DOIUrl":"https://doi.org/10.1109/FREQ.2010.5556244","url":null,"abstract":"We developed an effective technique for phase synchronization of a cryogenic microwave oscillator. The achieved quality of phase synchronization is a few milliradians. It enables accurate measurements of extremely weak phase fluctuations expected from the next generation of frequency stabilized microwave oscillators based on the cryogenically cooled sapphire dielectric resonators.","PeriodicalId":344989,"journal":{"name":"2010 IEEE International Frequency Control Symposium","volume":"611 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131691147","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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