{"title":"An electrostatically-driven MEMS tunable miniature iris diaphragm","authors":"Hongbin Yu, Guangya Zhou, F. Chau","doi":"10.1109/OMEMS.2012.6318854","DOIUrl":null,"url":null,"abstract":"A miniature tunable multi-blade iris diaphragm driven by microelectromechanical systems (MEMS) is developed. The diameter of the iris diaphragm aperture is experimentally demonstrated to be able to adjust continuously from 0.45 mm to 1.56 mm.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"5 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 International Conference on Optical MEMS and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2012.6318854","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
A miniature tunable multi-blade iris diaphragm driven by microelectromechanical systems (MEMS) is developed. The diameter of the iris diaphragm aperture is experimentally demonstrated to be able to adjust continuously from 0.45 mm to 1.56 mm.
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