Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318772
Hyungryul J Choi, I. Cornago, Jeong-Gil Kim, Tim Savas, G. Barbastathis
We propose and experimentally demonstrate a novel method to fabricate subwavelength silica nanocone arrays with high aspect ratio (~7) for multifunctional surfaces having anti-reflective, self-cleaning, and anti-fogging properties.
{"title":"Fabrication of ultra high aspect ratio silica nanocone arrays by multiple shrinking mask etching","authors":"Hyungryul J Choi, I. Cornago, Jeong-Gil Kim, Tim Savas, G. Barbastathis","doi":"10.1109/OMEMS.2012.6318772","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318772","url":null,"abstract":"We propose and experimentally demonstrate a novel method to fabricate subwavelength silica nanocone arrays with high aspect ratio (~7) for multifunctional surfaces having anti-reflective, self-cleaning, and anti-fogging properties.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"134 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115165555","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318877
Y. Du, K. Cheo, Guang-xiang Zhou, F. Chau
A single-pixel spectral line imager based on a highspeed MEMS grating scanner is demonstrated to possess the capability of resolving 104 spectral bands and 250 spatial pixels. Delauney Triangulation is used in the signal processing to correct the spectral image distortions.
{"title":"A spectral line imager based on a MEMS vibratory grating scanner","authors":"Y. Du, K. Cheo, Guang-xiang Zhou, F. Chau","doi":"10.1109/OMEMS.2012.6318877","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318877","url":null,"abstract":"A single-pixel spectral line imager based on a highspeed MEMS grating scanner is demonstrated to possess the capability of resolving 104 spectral bands and 250 spatial pixels. Delauney Triangulation is used in the signal processing to correct the spectral image distortions.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115105633","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318858
Yen-Sheng Lu, Hongyi Xu, Hanhong Gao, C. M. Hsieh, Baile Zhang, Handong Sun, G. Barbastathis
We present the first ever design of bending adaptor based on transformation optics at near-infrared frequency (1550 nm). The Si-air nanograting structure with period <; 0.1 λ has sufficient anisotropy for light bending by 60°.
{"title":"Design and fabrication of dielectric nanostructured bending adaptor for optical frequencies","authors":"Yen-Sheng Lu, Hongyi Xu, Hanhong Gao, C. M. Hsieh, Baile Zhang, Handong Sun, G. Barbastathis","doi":"10.1109/OMEMS.2012.6318858","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318858","url":null,"abstract":"We present the first ever design of bending adaptor based on transformation optics at near-infrared frequency (1550 nm). The Si-air nanograting structure with period <; 0.1 λ has sufficient anisotropy for light bending by 60°.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122371954","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318870
Byounghun Park, Kyungmook Kwon, Kyoungsik Yu
We report efficient non-imaging emission collection optics for compact fluorescence detection systems. A combination of hemispherical dome mirrors redirects and integrates the isotropic fluorescent emission toward the photodetector, and significantly enhances the fluorescence signal level.
{"title":"Non-imaging fluorescence detection system with hemispherical dome reflectors","authors":"Byounghun Park, Kyungmook Kwon, Kyoungsik Yu","doi":"10.1109/OMEMS.2012.6318870","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318870","url":null,"abstract":"We report efficient non-imaging emission collection optics for compact fluorescence detection systems. A combination of hemispherical dome mirrors redirects and integrates the isotropic fluorescent emission toward the photodetector, and significantly enhances the fluorescence signal level.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122153584","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318811
Peng Qu, H. Qu
Residual stress developed during thermal processes in fabrication is ubiquitous in MEMS devices. While the residual stress is exploited in many devices to generate initial displacements of freestanding structures in the device [1-2], it can also cause severe problems during and after device fabrications. Post-development of residual stress over long term can deteriorate the performance and even fail the device completely [3]. In the DRIE based microfabrication of our previous CMOS-MEMS electrostatic micro mirrors, sudden release and even crash of microstructures in plasma etching chamber was observed. This is due to the considerable large stress in the multiple-layer microstructures and the low damping effect in the chamber where high vacuum is present [4]. One possible solution to this troublesome final step is to release the microstructures in ambient with higher damping factor.
{"title":"A novel release mechanism utilizing micro-fuse for CMOS-MEMS micro-mirror","authors":"Peng Qu, H. Qu","doi":"10.1109/OMEMS.2012.6318811","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318811","url":null,"abstract":"Residual stress developed during thermal processes in fabrication is ubiquitous in MEMS devices. While the residual stress is exploited in many devices to generate initial displacements of freestanding structures in the device [1-2], it can also cause severe problems during and after device fabrications. Post-development of residual stress over long term can deteriorate the performance and even fail the device completely [3]. In the DRIE based microfabrication of our previous CMOS-MEMS electrostatic micro mirrors, sudden release and even crash of microstructures in plasma etching chamber was observed. This is due to the considerable large stress in the multiple-layer microstructures and the low damping effect in the chamber where high vacuum is present [4]. One possible solution to this troublesome final step is to release the microstructures in ambient with higher damping factor.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"55 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128548095","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318849
S. Yoo, Joo-Young Jin, Joon-Geun Ha, C. Ji, Yong-Kweon Kim
We present a novel fabrication method of a two-dimensional forward optical scanner with integrated microlens. Glass microlens and electrical isolation blocks were integrated with silicon XY-stage using thermal reflow process. Measured scan angles in X and Y directions at resonance were ±4.9° and ±5.0°, respectively, at atmospheric pressure.
{"title":"2-D forward optical scanner with glass microlens and isolation blocks using thermal reflow","authors":"S. Yoo, Joo-Young Jin, Joon-Geun Ha, C. Ji, Yong-Kweon Kim","doi":"10.1109/OMEMS.2012.6318849","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318849","url":null,"abstract":"We present a novel fabrication method of a two-dimensional forward optical scanner with integrated microlens. Glass microlens and electrical isolation blocks were integrated with silicon XY-stage using thermal reflow process. Measured scan angles in X and Y directions at resonance were ±4.9° and ±5.0°, respectively, at atmospheric pressure.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128574436","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318780
O. Krupin, P. Berini
Surface plasmon waveguides consisting of Au stripes in microfluidic channels are highly suitable as biosensors. They are capable of detecting analyte of mass over a very large dynamic range (cells to proteins) with competitive sensitivity.
{"title":"Biosensing using long-range surface plasmon-polariton waveguides","authors":"O. Krupin, P. Berini","doi":"10.1109/OMEMS.2012.6318780","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318780","url":null,"abstract":"Surface plasmon waveguides consisting of Au stripes in microfluidic channels are highly suitable as biosensors. They are capable of detecting analyte of mass over a very large dynamic range (cells to proteins) with competitive sensitivity.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115472706","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318785
Zhengli Han, H. Fujita, H. Toshiyoshi
High-frequency electromagnetic-field simulation HFSS has been performed on sub-millimeter scale split-ring resonator (SRR) metamaterials to propose electrostatically tunable THz frequency filters with integrated RF-MEMS variable capacitors and switches.
{"title":"Electrostatically tunable MEMS THz metamaterials based on DC/RF decoupled split-ring resonator arrays","authors":"Zhengli Han, H. Fujita, H. Toshiyoshi","doi":"10.1109/OMEMS.2012.6318785","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318785","url":null,"abstract":"High-frequency electromagnetic-field simulation HFSS has been performed on sub-millimeter scale split-ring resonator (SRR) metamaterials to propose electrostatically tunable THz frequency filters with integrated RF-MEMS variable capacitors and switches.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114979424","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318786
H. B. Chan, Y. Bao, J. Zou
The Casimir force arising from quantum fluctuations could become the dominant interaction in silicon micromechanical devices under the appropriate conditions. The measured force is distinct from the pairwise summation of van der Waals forces.
{"title":"The Casimir effect on silicon micromechanical systems: Forces due to virtual photons","authors":"H. B. Chan, Y. Bao, J. Zou","doi":"10.1109/OMEMS.2012.6318786","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318786","url":null,"abstract":"The Casimir force arising from quantum fluctuations could become the dominant interaction in silicon micromechanical devices under the appropriate conditions. The measured force is distinct from the pairwise summation of van der Waals forces.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124479765","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318800
Wei Zhang, H. Zappe, Andreas Seifert
We present a polyacrylate-based thermopneumati-cally tunable liquid microlens with on-chip actuation for focal length tuning. The use of a polyacrylate membrane allows use of silicone oil as the optical liquid without any swelling or degradation.
{"title":"Polyacrylate tunable microlens with on-chip thermopneumatic actuation","authors":"Wei Zhang, H. Zappe, Andreas Seifert","doi":"10.1109/OMEMS.2012.6318800","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318800","url":null,"abstract":"We present a polyacrylate-based thermopneumati-cally tunable liquid microlens with on-chip actuation for focal length tuning. The use of a polyacrylate membrane allows use of silicone oil as the optical liquid without any swelling or degradation.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129593873","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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