{"title":"An experimental research of love wave sensor based on LiTaO3/SiO2 structure","authors":"Gui Chen, Xiao Xie, Wen Wang, Shitang He","doi":"10.1109/SPAWDA.2014.6996811","DOIUrl":null,"url":null,"abstract":"Temperature characteristics of SiO<sub>2</sub>-coated Love Wave oscillators are presented from 10 °C to 60 °C. Surface skimming bulk wave (SSBW) and Love Wave delay line devices were fabricated on the 36 °YX-LiTaO<sub>3</sub> substrate. Near zero TCF of SiO<sub>2</sub>-coated Love Wave oscillators from 10 °C to 60 °C are demonstrated in the 150MHz range. In the gas sensor experiment on dimethylmethylphosphonate (DMMP) detection, the fabricated SXFA-coated chemical sensor exhibited a threshold detection limit and high sensitivity.","PeriodicalId":412736,"journal":{"name":"Proceedings of the 2014 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications","volume":"2 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-12-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 2014 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SPAWDA.2014.6996811","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
Temperature characteristics of SiO2-coated Love Wave oscillators are presented from 10 °C to 60 °C. Surface skimming bulk wave (SSBW) and Love Wave delay line devices were fabricated on the 36 °YX-LiTaO3 substrate. Near zero TCF of SiO2-coated Love Wave oscillators from 10 °C to 60 °C are demonstrated in the 150MHz range. In the gas sensor experiment on dimethylmethylphosphonate (DMMP) detection, the fabricated SXFA-coated chemical sensor exhibited a threshold detection limit and high sensitivity.
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