Cross-sensitivity of humidity sensor layers based on organic materials

Abstract

This article deals with the research of an impact of various gases and vapours on electrical parameters of phthalocyanine. Cross-sensitivity was researched in order to exclude a negative impact of organic vapours on humidity sensor. Thin layer of phthalocyanine was exposed to various vapours, and then responses of its electrical characteristics were measured. This suitable material for humidity sensors, was deposited from the liquid phase on a substrate with interdigital electrodes and than exposed to the effect of analytes. Subsequently, the impedance characteristic of this thin film layer was measured. The comparison of responses to various gases and vapours is discussed in more detail as well.