Macromodel for the transient simulation of electrostatically actuated fixed-fixed beams

Abstract

This paper presents a macromodel for the transient simulation of fixed-fixed beams (FFBs). Based on the energy method, the proposed macromodel enables system-level simulation of FFB beams with their associated read out circuitry. It is geared towards use in network simulators such as SPICE. In contrast to previously reported works, the proposed macromodel accounts for fringing field effects and relies on a novel and more accurate beam profile. As a result the proposed macromodel exhibits a capacitance error of only 3.2% and a 50% improvement in deflection accuracy compared to prior works.