{"title":"Usefulness of nanocrystalline silicon ballistic emitter for operation in either low-vacuum or atmospheric pressure","authors":"N. Koshida, A. Kojima, T. Ichihara, T. Komoda","doi":"10.1109/IVNC.2004.1354992","DOIUrl":null,"url":null,"abstract":"The nc-Si emitter operates as a ballistic cold cathode in low vacuum and as a negative ion source in atmospheric pressure. This usefulness is consistent with the ballistic emission model that energetic electrons are generated in nc-Si chains interconnected via thin oxides. The present result indicates further potential of this emitter for various applications in a wide range of pressure and gas ambient.","PeriodicalId":137345,"journal":{"name":"Technical Digest of the 17th International Vacuum Nanoelectronics Conference (IEEE Cat. No.04TH8737)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2004-07-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Technical Digest of the 17th International Vacuum Nanoelectronics Conference (IEEE Cat. No.04TH8737)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IVNC.2004.1354992","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The nc-Si emitter operates as a ballistic cold cathode in low vacuum and as a negative ion source in atmospheric pressure. This usefulness is consistent with the ballistic emission model that energetic electrons are generated in nc-Si chains interconnected via thin oxides. The present result indicates further potential of this emitter for various applications in a wide range of pressure and gas ambient.
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