首页 > 最新文献

Technical Digest of the 17th International Vacuum Nanoelectronics Conference (IEEE Cat. No.04TH8737)最新文献

英文 中文
Stable and high emission current from carbon nanotube paste with spin on glass 玻璃上自旋碳纳米管浆料具有稳定的高发射电流
Jae-Hong Park, J. Moon, Jae-Hee Han, A. Berdinsky, J. Yoo, Chong-Yun Park
We prepared carbon nanotube (CNT) pastes with different inorganic binders such as glass frit and spin on glass (SOG). MWNT powders grown by CVD were used for electron emissive source. The three-roll mill process was carried out for mixing and dispersion of CNT powders in organic vehicle as polymer matrix. CNT paste was printed onto various substrates such as an indium thin oxide (ITO) coated soda lime glass and a nickel plate. Then CNT paste was sintered under different ambient and temperature. For the analysis of the surface morphology of the cathode layer, field-emission scanning electron microscopy (FESEM) was used. The FE characteristics of CNT paste were measured in a high vacuum chamber with a parallel diode type configuration at 5/spl times/10/sup -6/ Torr. We obtained stable and high emission current from CNT paste with SOG. Our experiments have shown that CNT paste with SOG can use as efficient electron emitter in vacuum nanoelectronics such as radio frequency amplifier, field emission display and X-ray tube.
用不同的无机粘结剂如玻璃熔块和玻璃自旋(SOG)制备了碳纳米管(CNT)浆料。采用气相沉积法生长的MWNT粉末作为电子发射源。采用三辊磨工艺对碳纳米管粉体在有机载体中作为聚合物基质进行了混合和分散。碳纳米管浆料被印刷在各种衬底上,如铟薄氧化物(ITO)涂层的钠石灰玻璃和镍板。然后在不同的环境和温度下烧结碳纳米管膏体。采用场发射扫描电镜(FESEM)对阴极层表面形貌进行了分析。在5/spl倍/10/sup -6/ Torr的高真空室中,采用并联二极管结构测量了碳纳米管浆料的有限元特性。我们得到了稳定的高发射电流的碳纳米管浆料。实验结果表明,含SOG的碳纳米管浆料可以用作射频放大器、场发射显示器和x射线管等真空纳米电子器件的高效电子发射体。
{"title":"Stable and high emission current from carbon nanotube paste with spin on glass","authors":"Jae-Hong Park, J. Moon, Jae-Hee Han, A. Berdinsky, J. Yoo, Chong-Yun Park","doi":"10.1116/1.1880192","DOIUrl":"https://doi.org/10.1116/1.1880192","url":null,"abstract":"We prepared carbon nanotube (CNT) pastes with different inorganic binders such as glass frit and spin on glass (SOG). MWNT powders grown by CVD were used for electron emissive source. The three-roll mill process was carried out for mixing and dispersion of CNT powders in organic vehicle as polymer matrix. CNT paste was printed onto various substrates such as an indium thin oxide (ITO) coated soda lime glass and a nickel plate. Then CNT paste was sintered under different ambient and temperature. For the analysis of the surface morphology of the cathode layer, field-emission scanning electron microscopy (FESEM) was used. The FE characteristics of CNT paste were measured in a high vacuum chamber with a parallel diode type configuration at 5/spl times/10/sup -6/ Torr. We obtained stable and high emission current from CNT paste with SOG. Our experiments have shown that CNT paste with SOG can use as efficient electron emitter in vacuum nanoelectronics such as radio frequency amplifier, field emission display and X-ray tube.","PeriodicalId":137345,"journal":{"name":"Technical Digest of the 17th International Vacuum Nanoelectronics Conference (IEEE Cat. No.04TH8737)","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-04-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114296124","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 11
X-ray generation from large area carbon-based field emitters 大面积碳基场发射体产生的x射线
H. Busta, S. Lesiak, R. Myers, B. Zwicker
In addition to displays, sensors, and microwave amplifiers, field emitters are being considered for x-ray generation. Published results describe carbon nanotube-based emitters nanocrystalline graphite, and silicon emitters [2] intended for relatively small size applications such as in catheters for restenosis treatment in cardiac arteries and for cancer therapy. Larger x-ray sources are¿also of great interest. for food sterilization, waste water treatment, homeland security, and others. By using carbon-based emitters similar to those described in, we are investigating xray sources with total emission areas approaching square meter sizes.
除了显示器、传感器和微波放大器之外,人们还在考虑用场发射器来产生x射线。已发表的研究结果描述了基于碳纳米管的发射体纳米晶石墨和硅发射体[2],这些发射体用于相对小尺寸的应用,例如用于心脏动脉再狭窄治疗和癌症治疗的导管。更大的x射线源也引起了极大的兴趣。用于食品杀菌、废水处理、国土安全等。通过使用与中描述的相似的碳基发射器,我们正在研究总发射面积接近平方米大小的x射线源。
{"title":"X-ray generation from large area carbon-based field emitters","authors":"H. Busta, S. Lesiak, R. Myers, B. Zwicker","doi":"10.1116/1.1880172","DOIUrl":"https://doi.org/10.1116/1.1880172","url":null,"abstract":"In addition to displays, sensors, and microwave amplifiers, field emitters are being considered for x-ray generation. Published results describe carbon nanotube-based emitters nanocrystalline graphite, and silicon emitters [2] intended for relatively small size applications such as in catheters for restenosis treatment in cardiac arteries and for cancer therapy. Larger x-ray sources are¿also of great interest. for food sterilization, waste water treatment, homeland security, and others. By using carbon-based emitters similar to those described in, we are investigating xray sources with total emission areas approaching square meter sizes.","PeriodicalId":137345,"journal":{"name":"Technical Digest of the 17th International Vacuum Nanoelectronics Conference (IEEE Cat. No.04TH8737)","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-07-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115763491","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Field emission from polymer flims 聚合物薄膜的场发射
A. Ionov, E. O. Popov, V. Svetlichnyi, M. Nikolaeva, A. Pashkevich
At present a significant attention is focused on the search for new perspective materials for low-threshold field emission cathodes which could be work stable in the relatively low (~10.~ Torr) vacuum conditions. There are many designs of field emission cathodes on the base of carbon-like materials and diamond films [l-51. The low electron affinity, wide bandgap and excellent transport properties of some conducting organic polymers suggest that they might also provide good cathode materials (61. Here we demonstrate that it is so also for imidesiloxane copolymer.
目前,寻找低阈值场发射阴极的新前景材料是一个重要的研究重点,这种材料可以在相对较低的(~10。~ Torr)真空条件。基于类碳材料和金刚石薄膜的场发射阴极设计有很多种[l-51]。一些导电有机聚合物的低电子亲和性、宽带隙和优异的输运特性表明它们也可能提供良好的正极材料(61。在这里,我们证明了对于亚胺硅氧烷共聚物也是如此。
{"title":"Field emission from polymer flims","authors":"A. Ionov, E. O. Popov, V. Svetlichnyi, M. Nikolaeva, A. Pashkevich","doi":"10.1109/IVNC.2004.1355013","DOIUrl":"https://doi.org/10.1109/IVNC.2004.1355013","url":null,"abstract":"At present a significant attention is focused on the search for new perspective materials for low-threshold field emission cathodes which could be work stable in the relatively low (~10.~ Torr) vacuum conditions. There are many designs of field emission cathodes on the base of carbon-like materials and diamond films [l-51. The low electron affinity, wide bandgap and excellent transport properties of some conducting organic polymers suggest that they might also provide good cathode materials (61. Here we demonstrate that it is so also for imidesiloxane copolymer.","PeriodicalId":137345,"journal":{"name":"Technical Digest of the 17th International Vacuum Nanoelectronics Conference (IEEE Cat. No.04TH8737)","volume":"2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-07-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114618971","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Properties of single field emitters deduced by use of spherical Fowler-Nordheim theory 用球形Fowler-Nordheim理论推导了单场发射体的性质
S. Creek, C. Edgcombe, N. de Jonge, U. Valdré
Investigation of the electron emission process of carbon nanotubes is required for their application as electron sources, for example in displays, electron beam lithography machines and electron microscopes. Fowler-Nordheim (F-N) theory has recently been extended to apply to spherical emitting surfaces.
为了将碳纳米管作为电子源应用于显示器、电子束光刻机和电子显微镜等领域,需要研究碳纳米管的电子发射过程。Fowler-Nordheim (F-N)理论最近被推广到球形发射表面。
{"title":"Properties of single field emitters deduced by use of spherical Fowler-Nordheim theory","authors":"S. Creek, C. Edgcombe, N. de Jonge, U. Valdré","doi":"10.1109/IVNC.2004.1354887","DOIUrl":"https://doi.org/10.1109/IVNC.2004.1354887","url":null,"abstract":"Investigation of the electron emission process of carbon nanotubes is required for their application as electron sources, for example in displays, electron beam lithography machines and electron microscopes. Fowler-Nordheim (F-N) theory has recently been extended to apply to spherical emitting surfaces.","PeriodicalId":137345,"journal":{"name":"Technical Digest of the 17th International Vacuum Nanoelectronics Conference (IEEE Cat. No.04TH8737)","volume":"44 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-07-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114656344","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Field electron emission from ultra-ifigh density Si nanotip arrays 超高密度硅纳米尖阵列的场电子发射
K. Zhao, J. She, J. Zhou, S. Deng, J. Chen, N. Xu
Earlier, welldeveloped techniques of reactive ion etching (insotropic) and wet chemical etching (anisotropic) in combination with oxidation sharpening were used for the fabrication of nanotip arrays for field electron emission applications. The fabrications require lithography technique to form masks for the following etching, and normally high temperature oxidation sharpening process is needed. In the present paper, we report a non-lithography and non-oxidation-sharpening method for ultra-high .&nsity Si nanotip arrays fabrication. In addition, novel processes were developed to obtain Si nanotip array with different coating materials on apex, i.e., Sic and amorphous Si (a-Si). Comparative studies were carried out on the field electron emission properties of the Si nanotip arrays with different coated layers.
在此之前,成熟的反应离子刻蚀(各向异性)和湿化学刻蚀(各向异性)技术结合氧化锐化技术被用于制造用于场电子发射应用的纳米尖端阵列。这种制造需要光刻技术来形成后续蚀刻的掩模,通常需要高温氧化锐化过程。本文报道了一种制造超高密度硅纳米针尖阵列的非光刻和非氧化锐化方法。在此基础上,提出了采用Sic和非晶硅(a-Si)两种不同涂层制备硅纳米尖阵列的新工艺。对比研究了不同包覆层的硅纳米尖阵列的场电子发射特性。
{"title":"Field electron emission from ultra-ifigh density Si nanotip arrays","authors":"K. Zhao, J. She, J. Zhou, S. Deng, J. Chen, N. Xu","doi":"10.1109/IVNC.2004.1355012","DOIUrl":"https://doi.org/10.1109/IVNC.2004.1355012","url":null,"abstract":"Earlier, welldeveloped techniques of reactive ion etching (insotropic) and wet chemical etching (anisotropic) in combination with oxidation sharpening were used for the fabrication of nanotip arrays for field electron emission applications. The fabrications require lithography technique to form masks for the following etching, and normally high temperature oxidation sharpening process is needed. In the present paper, we report a non-lithography and non-oxidation-sharpening method for ultra-high .&nsity Si nanotip arrays fabrication. In addition, novel processes were developed to obtain Si nanotip array with different coating materials on apex, i.e., Sic and amorphous Si (a-Si). Comparative studies were carried out on the field electron emission properties of the Si nanotip arrays with different coated layers.","PeriodicalId":137345,"journal":{"name":"Technical Digest of the 17th International Vacuum Nanoelectronics Conference (IEEE Cat. No.04TH8737)","volume":"42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-07-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123036159","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Development of a MEMS-based gate to enhance cold-cathode electron field emission for space applications 用于空间应用的增强冷阴极电子场发射的mems栅极的研制
H. Goldberg, P. A. Encarnacion, B. Gilchrist, R. Clarke, D. Morris, J.L. Van Noord
A gated structure of arrays of micron-sized holes has been developed at the University of Michigan. The structure can be positioned atop any uniformly structured planar emitting surface and biased to effect electron emission. The structure is designed to be compatible with a variety of emission surface technologies such as thin films (e.g., boron nitride), carbon nanotubes, and self-assembled nanostructures.
密歇根大学开发了一种微米级孔阵列的门控结构。该结构可以放置在任何均匀结构的平面发射表面上,并偏压以影响电子发射。该结构被设计为与各种发射表面技术兼容,如薄膜(例如,氮化硼),碳纳米管和自组装纳米结构。
{"title":"Development of a MEMS-based gate to enhance cold-cathode electron field emission for space applications","authors":"H. Goldberg, P. A. Encarnacion, B. Gilchrist, R. Clarke, D. Morris, J.L. Van Noord","doi":"10.1109/IVNC.2004.1355019","DOIUrl":"https://doi.org/10.1109/IVNC.2004.1355019","url":null,"abstract":"A gated structure of arrays of micron-sized holes has been developed at the University of Michigan. The structure can be positioned atop any uniformly structured planar emitting surface and biased to effect electron emission. The structure is designed to be compatible with a variety of emission surface technologies such as thin films (e.g., boron nitride), carbon nanotubes, and self-assembled nanostructures.","PeriodicalId":137345,"journal":{"name":"Technical Digest of the 17th International Vacuum Nanoelectronics Conference (IEEE Cat. No.04TH8737)","volume":"209 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-07-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116171567","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Structural deformation of single-wall carbon nanotubes during field emission process 场发射过程中单壁碳纳米管的结构变形
S.H. Lee, J. Lee, W. Kim, T. Jeong, J. Heo, J. Park, J.M. Kim, S. Cho, T. Yoon, M. Yoo, J. Moon, J. Nam, H. Lee, J.H. Park, J. Ha, D. Choe
Stable electron emission from CNT emitters at required current densities is necessary to apply to the commercial devices. Generally, the current degradation during field emission has been understood as evaporation of emitter or breaking apart of tip end under intensive electrical field. In this report, we suggest one more possible mechanism that the emission current degradation may occur by increased resistance of emitters through structural deformation under field emission. The effect of current density and time on the structure of SWNT emitters was studied with TEM, low current density (100 /spl mu/A/cm/sup 2/ for 1 h) application gave no detectable structural deformation with comparison to pristine SWNTs. However, the bundles of SWNTs were deformed to amorphous structure starting at tip ends or defect sites when a high current density (500 /spl mu/m/cm/sup 2/ for more than 1h) was applied. It supports that the deformation of SWNT results from heat during emission at emitters. It is understood that the heat during emission could give a rise to destruct the crystalline structure and reconstruct the carbon bonding in SWNTs bundles. We also understood that the increase of the turn-on voltage is attributed to the increase of electrical resistance of emitters raising from structural deformation during emission process.
在要求的电流密度下,碳纳米管发射器的稳定电子发射是应用于商业设备所必需的。一般将场发射过程中的电流退化理解为强电场作用下发射极的蒸发或尖端的断裂。在本报告中,我们提出了另一种可能的机制,即在场发射作用下,结构变形导致发射体电阻增加,从而导致发射电流退化。通过透射电镜研究了电流密度和时间对SWNT发射体结构的影响,与原始SWNT相比,低电流密度(100 /spl mu/A/cm/sup 2/ 1 h)的应用没有检测到结构变形。然而,当施加高电流密度(500 /spl mu/m/cm/sup 2/)超过1h时,单壁碳纳米管束从尖端或缺陷部位开始变形为非晶结构。这支持了单壁碳纳米管的变形是由于发射过程中的热量造成的。发射过程中的热量可以破坏纳米碳管的晶体结构,重建纳米碳管束中的碳键。我们还了解到,导通电压的增加是由于发射过程中结构变形引起的发射体电阻的增加。
{"title":"Structural deformation of single-wall carbon nanotubes during field emission process","authors":"S.H. Lee, J. Lee, W. Kim, T. Jeong, J. Heo, J. Park, J.M. Kim, S. Cho, T. Yoon, M. Yoo, J. Moon, J. Nam, H. Lee, J.H. Park, J. Ha, D. Choe","doi":"10.1109/IVNC.2004.1354897","DOIUrl":"https://doi.org/10.1109/IVNC.2004.1354897","url":null,"abstract":"Stable electron emission from CNT emitters at required current densities is necessary to apply to the commercial devices. Generally, the current degradation during field emission has been understood as evaporation of emitter or breaking apart of tip end under intensive electrical field. In this report, we suggest one more possible mechanism that the emission current degradation may occur by increased resistance of emitters through structural deformation under field emission. The effect of current density and time on the structure of SWNT emitters was studied with TEM, low current density (100 /spl mu/A/cm/sup 2/ for 1 h) application gave no detectable structural deformation with comparison to pristine SWNTs. However, the bundles of SWNTs were deformed to amorphous structure starting at tip ends or defect sites when a high current density (500 /spl mu/m/cm/sup 2/ for more than 1h) was applied. It supports that the deformation of SWNT results from heat during emission at emitters. It is understood that the heat during emission could give a rise to destruct the crystalline structure and reconstruct the carbon bonding in SWNTs bundles. We also understood that the increase of the turn-on voltage is attributed to the increase of electrical resistance of emitters raising from structural deformation during emission process.","PeriodicalId":137345,"journal":{"name":"Technical Digest of the 17th International Vacuum Nanoelectronics Conference (IEEE Cat. No.04TH8737)","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-07-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133915248","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Self-organized laser-produced Si and Ni micro-tip field endfter arrays enchanced with carbon nanotubes 碳纳米管增强自组织激光制备的硅和镍微尖端场端阵列
A. Karabutov, A. V. Simakin, E. N. Loubnin, G. A. Shafeev
Self-organized Si and metal micro-tip effective field electron emission arrays were produced using laser beam evaporation. Simple and relatively cheap production method of the quazi-periodical micro-tip arrays, which does not require any lithographic and microelectronic procedures, allows to form field electron emitters with very low emission threshold field of 1-5 V/w. Further improvement of the emission uniformity and the threshold field for the arrays can be achieved by modification of our production technique and introducing of carbon nanotube incorporation during the laser beam evaporation process. Quazi-periodical arrays of Si and Ni micro-tips with carbon nanotubes incorporated into the surface layer were produced by laser-assisted evaporation of Si or Ni wafers in vacuum.
利用激光束蒸发制备了自组织硅和金属微针尖有效场电子发射阵列。准周期微针尖阵列的生产方法简单且相对便宜,不需要任何光刻和微电子程序,可以形成1-5 V/w的极低发射阈值场的场电子发射器。通过改进生产工艺,在激光束蒸发过程中引入碳纳米管,可以进一步改善阵列的发射均匀性和阈值场。采用真空激光蒸发的方法制备了硅或镍微针尖的准周期阵列,并将碳纳米管嵌入其表层。
{"title":"Self-organized laser-produced Si and Ni micro-tip field endfter arrays enchanced with carbon nanotubes","authors":"A. Karabutov, A. V. Simakin, E. N. Loubnin, G. A. Shafeev","doi":"10.1109/IVNC.2004.1354894","DOIUrl":"https://doi.org/10.1109/IVNC.2004.1354894","url":null,"abstract":"Self-organized Si and metal micro-tip effective field electron emission arrays were produced using laser beam evaporation. Simple and relatively cheap production method of the quazi-periodical micro-tip arrays, which does not require any lithographic and microelectronic procedures, allows to form field electron emitters with very low emission threshold field of 1-5 V/w. Further improvement of the emission uniformity and the threshold field for the arrays can be achieved by modification of our production technique and introducing of carbon nanotube incorporation during the laser beam evaporation process. Quazi-periodical arrays of Si and Ni micro-tips with carbon nanotubes incorporated into the surface layer were produced by laser-assisted evaporation of Si or Ni wafers in vacuum.","PeriodicalId":137345,"journal":{"name":"Technical Digest of the 17th International Vacuum Nanoelectronics Conference (IEEE Cat. No.04TH8737)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-07-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125281779","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Fabrication and characterization of gated carbon nanotube emitters in a trench structure 沟槽结构门控碳纳米管发射体的制备与表征
Y.F. Liao, J. She, H. He, S. Deng, Jun Chen, N. Xu
In the present paper, gated CNTs devices were fabricated via processes of (i) predefining a trench with thin SiO/sub 2/ spacer layer and Cr extractor layer on top to form a fine gated device structure by using traditional ultraviolet light lithography and selective etching techniques; (ii) locally depositing iron (Fe) catalyst on the bottom of the gated structure employing a self-aligned method; (iii) locally growing CNT emitter inside the gated structure by a thermal chemical vapor deposition (CVD) system. Field emission characteristics of the gated CNTs devices were studied in a high vacuum chamber. The corresponding F-N plot of the I-V curve in were calculated and the result showed a linear behavior, demonstrating that the current was generated by field electron emission.
在本文中,门控型碳纳米管器件的制备过程是:(i)利用传统的紫外光光刻和选择性蚀刻技术,预先定义一条沟槽,沟槽上有薄薄的SiO/ sub2 /间隔层和Cr萃取层,形成精细的门控器件结构;(ii)采用自对准方法在门控结构底部局部沉积铁(Fe)催化剂;(iii)利用热化学气相沉积(CVD)系统在门控结构内部局部生长碳纳米管发射极。在高真空室中研究了门控碳纳米管器件的场发射特性。计算了相应的I-V曲线的F-N图,结果显示出线性行为,表明电流是由场电子发射产生的。
{"title":"Fabrication and characterization of gated carbon nanotube emitters in a trench structure","authors":"Y.F. Liao, J. She, H. He, S. Deng, Jun Chen, N. Xu","doi":"10.1109/IVNC.2004.1354901","DOIUrl":"https://doi.org/10.1109/IVNC.2004.1354901","url":null,"abstract":"In the present paper, gated CNTs devices were fabricated via processes of (i) predefining a trench with thin SiO/sub 2/ spacer layer and Cr extractor layer on top to form a fine gated device structure by using traditional ultraviolet light lithography and selective etching techniques; (ii) locally depositing iron (Fe) catalyst on the bottom of the gated structure employing a self-aligned method; (iii) locally growing CNT emitter inside the gated structure by a thermal chemical vapor deposition (CVD) system. Field emission characteristics of the gated CNTs devices were studied in a high vacuum chamber. The corresponding F-N plot of the I-V curve in were calculated and the result showed a linear behavior, demonstrating that the current was generated by field electron emission.","PeriodicalId":137345,"journal":{"name":"Technical Digest of the 17th International Vacuum Nanoelectronics Conference (IEEE Cat. No.04TH8737)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-07-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117064604","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Optimization of electron field emission from carbon nanotube paste 碳纳米管浆料的电子场发射优化
Y. Kim, K. Sohn, Y. Cho, E. Yoo
Photosensitive organic binder was mixed with well-dispersed arc discharged single-walled carbon nanotubes (CNTs). The CNT-paste was screen-printed on the Cr-patterned glass substrate. Following back-side UV exposure, binder burn-out processes were carried out for accurate and fine patterning of paste. Emission images were obtained from a cathode successively: (a) as-prepared, (b) just after rubber-roll treatment and (c) after multiple I-V cycling. Improvement of emission properties with I-V cycling was observed from scanning electron micrographs (SEM) and I-V curves. The morphology of printed-CNTs was remarkably changed after I-V cycling. Parallel alignment of CNTs to the field direction become permanent after multiple field emission cycles. The field emission threshold was about 2.5 V/spl middot//spl mu/m/sup -1/ for the first measurement. In the successive emission cycles, the threshold fields decreased gradually to 1.9 V/spl middot//spl mu/m/sup -1/ for the final 13/sup th/ cycle. From the corresponding Fowler-Nordheim plots, the field enhancement factor (/spl beta/) of each line was evaluated. The average /spl beta/ values monotonically increased (from 1366 to 2120) with field emission repetition, which again confirmed the gradual vertical alignment of CNTs by multiple I-V cycles.
将光敏有机粘合剂与分散良好的电弧放电单壁碳纳米管(CNTs)混合。碳纳米管浆料丝网印刷在铬图案玻璃基板上。在背面UV曝光后,粘合剂燃烧过程进行了准确和精细的粘贴图案。从阴极上依次获得:(a)制备后的发射图像,(b)刚经过胶辊处理后的发射图像,(c)多次I-V循环后的发射图像。通过扫描电镜(SEM)和I-V曲线观察到I-V循环对发射性能的改善。I-V循环后,cnts的形貌发生了显著变化。经过多次场发射循环后,碳纳米管与场方向的平行排列成为永久性的。第一次测量的场发射阈值约为2.5 V/spl middot//spl mu/m/sup -1/。在连续发射周期中,阈值场逐渐减小至1.9 V/spl middot//spl mu/m/sup -1/。从相应的Fowler-Nordheim图中,评估每个品系的田间增强因子(/spl beta/)。随着场发射的重复,平均/spl β /值单调增加(从1366增加到2120),这再次证实了多次I-V循环使CNTs逐渐垂直排列。
{"title":"Optimization of electron field emission from carbon nanotube paste","authors":"Y. Kim, K. Sohn, Y. Cho, E. Yoo","doi":"10.1109/IVNC.2004.1354999","DOIUrl":"https://doi.org/10.1109/IVNC.2004.1354999","url":null,"abstract":"Photosensitive organic binder was mixed with well-dispersed arc discharged single-walled carbon nanotubes (CNTs). The CNT-paste was screen-printed on the Cr-patterned glass substrate. Following back-side UV exposure, binder burn-out processes were carried out for accurate and fine patterning of paste. Emission images were obtained from a cathode successively: (a) as-prepared, (b) just after rubber-roll treatment and (c) after multiple I-V cycling. Improvement of emission properties with I-V cycling was observed from scanning electron micrographs (SEM) and I-V curves. The morphology of printed-CNTs was remarkably changed after I-V cycling. Parallel alignment of CNTs to the field direction become permanent after multiple field emission cycles. The field emission threshold was about 2.5 V/spl middot//spl mu/m/sup -1/ for the first measurement. In the successive emission cycles, the threshold fields decreased gradually to 1.9 V/spl middot//spl mu/m/sup -1/ for the final 13/sup th/ cycle. From the corresponding Fowler-Nordheim plots, the field enhancement factor (/spl beta/) of each line was evaluated. The average /spl beta/ values monotonically increased (from 1366 to 2120) with field emission repetition, which again confirmed the gradual vertical alignment of CNTs by multiple I-V cycles.","PeriodicalId":137345,"journal":{"name":"Technical Digest of the 17th International Vacuum Nanoelectronics Conference (IEEE Cat. No.04TH8737)","volume":"35 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-07-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125167301","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
期刊
Technical Digest of the 17th International Vacuum Nanoelectronics Conference (IEEE Cat. No.04TH8737)
全部 Acc. Chem. Res. ACS Applied Bio Materials ACS Appl. Electron. Mater. ACS Appl. Energy Mater. ACS Appl. Mater. Interfaces ACS Appl. Nano Mater. ACS Appl. Polym. Mater. ACS BIOMATER-SCI ENG ACS Catal. ACS Cent. Sci. ACS Chem. Biol. ACS Chemical Health & Safety ACS Chem. Neurosci. ACS Comb. Sci. ACS Earth Space Chem. ACS Energy Lett. ACS Infect. Dis. ACS Macro Lett. ACS Mater. Lett. ACS Med. Chem. Lett. ACS Nano ACS Omega ACS Photonics ACS Sens. ACS Sustainable Chem. Eng. ACS Synth. Biol. Anal. Chem. BIOCHEMISTRY-US Bioconjugate Chem. BIOMACROMOLECULES Chem. Res. Toxicol. Chem. Rev. Chem. Mater. CRYST GROWTH DES ENERG FUEL Environ. Sci. Technol. Environ. Sci. Technol. Lett. Eur. J. Inorg. Chem. IND ENG CHEM RES Inorg. Chem. J. Agric. Food. Chem. J. Chem. Eng. Data J. Chem. Educ. J. Chem. Inf. Model. J. Chem. Theory Comput. J. Med. Chem. J. Nat. Prod. J PROTEOME RES J. Am. Chem. Soc. LANGMUIR MACROMOLECULES Mol. Pharmaceutics Nano Lett. Org. Lett. ORG PROCESS RES DEV ORGANOMETALLICS J. Org. Chem. J. Phys. Chem. J. Phys. Chem. A J. Phys. Chem. B J. Phys. Chem. C J. Phys. Chem. Lett. Analyst Anal. Methods Biomater. Sci. Catal. Sci. Technol. Chem. Commun. Chem. Soc. Rev. CHEM EDUC RES PRACT CRYSTENGCOMM Dalton Trans. Energy Environ. Sci. ENVIRON SCI-NANO ENVIRON SCI-PROC IMP ENVIRON SCI-WAT RES Faraday Discuss. Food Funct. Green Chem. Inorg. Chem. Front. Integr. Biol. J. Anal. At. Spectrom. J. Mater. Chem. A J. Mater. Chem. B J. Mater. Chem. C Lab Chip Mater. Chem. Front. Mater. Horiz. MEDCHEMCOMM Metallomics Mol. Biosyst. Mol. Syst. Des. Eng. Nanoscale Nanoscale Horiz. Nat. Prod. Rep. New J. Chem. Org. Biomol. Chem. Org. Chem. Front. PHOTOCH PHOTOBIO SCI PCCP Polym. Chem.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1