N. D. Md Sin, A. Shafura, M. H. Mamat, A. Mohamad, M. Rusop
{"title":"Humidity sensor based on SnO2 nanoparticle thin film synthesized by thermal chemical vapor deposition (CVD)","authors":"N. D. Md Sin, A. Shafura, M. H. Mamat, A. Mohamad, M. Rusop","doi":"10.1109/RSM.2013.6706530","DOIUrl":null,"url":null,"abstract":"SnO2 nanoparticle thin film has been synthesized by using thermal chemical vapor deposition (CVD). The SnO2 nanoparticle were growth on Au catalyst at different substrate temperature (400~550oC). The surface morphology of were characterized using field emission scanning electron microscopy (FESEM). The sensing properties of SnO2 nanoparticle thin film were examined using two point probe current-voltage (I-V) measurement (Keithley 2400). Heavily distribution of SnO2 nanoparticle thin film at 450°C that reveal from the FESEM image. The higher sensitivity of SnO2 nanoparticle thin film was performed good at 450°C compare to others samples with 45 ratio. The response and recovery of SnO2 nanoparticle thin film were 485 s and 24s respectively.","PeriodicalId":346255,"journal":{"name":"RSM 2013 IEEE Regional Symposium on Micro and Nanoelectronics","volume":"179 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2013-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"RSM 2013 IEEE Regional Symposium on Micro and Nanoelectronics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/RSM.2013.6706530","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
SnO2 nanoparticle thin film has been synthesized by using thermal chemical vapor deposition (CVD). The SnO2 nanoparticle were growth on Au catalyst at different substrate temperature (400~550oC). The surface morphology of were characterized using field emission scanning electron microscopy (FESEM). The sensing properties of SnO2 nanoparticle thin film were examined using two point probe current-voltage (I-V) measurement (Keithley 2400). Heavily distribution of SnO2 nanoparticle thin film at 450°C that reveal from the FESEM image. The higher sensitivity of SnO2 nanoparticle thin film was performed good at 450°C compare to others samples with 45 ratio. The response and recovery of SnO2 nanoparticle thin film were 485 s and 24s respectively.