Humidity sensor based on SnO2 nanoparticle thin film synthesized by thermal chemical vapor deposition (CVD)

N. D. Md Sin, A. Shafura, M. H. Mamat, A. Mohamad, M. Rusop
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引用次数: 1

Abstract

SnO2 nanoparticle thin film has been synthesized by using thermal chemical vapor deposition (CVD). The SnO2 nanoparticle were growth on Au catalyst at different substrate temperature (400~550oC). The surface morphology of were characterized using field emission scanning electron microscopy (FESEM). The sensing properties of SnO2 nanoparticle thin film were examined using two point probe current-voltage (I-V) measurement (Keithley 2400). Heavily distribution of SnO2 nanoparticle thin film at 450°C that reveal from the FESEM image. The higher sensitivity of SnO2 nanoparticle thin film was performed good at 450°C compare to others samples with 45 ratio. The response and recovery of SnO2 nanoparticle thin film were 485 s and 24s respectively.
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基于热化学气相沉积(CVD)合成SnO2纳米颗粒薄膜的湿度传感器
采用热化学气相沉积(CVD)法制备了SnO2纳米颗粒薄膜。在不同的衬底温度(400~550℃)下,在Au催化剂上生长SnO2纳米颗粒。采用场发射扫描电镜(FESEM)对其表面形貌进行了表征。采用两点探头电流-电压(I-V)测量仪(Keithley 2400)检测了SnO2纳米颗粒薄膜的传感性能。从FESEM图像可以看出,在450°C时,SnO2纳米颗粒薄膜大量分布。纳米SnO2薄膜在450°C温度下的灵敏度比其他样品高45倍。SnO2纳米颗粒薄膜的响应时间和回收率分别为485 s和24s。
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