{"title":"Simulation of system transmission values for different angles of incidence","authors":"Michael Wagner","doi":"10.1117/12.2676121","DOIUrl":null,"url":null,"abstract":"For the design of a new asphere measuring system, it is necessary to know transmission values for a system consisting of a source, an optional auxiliary filter and an optical filter, on which angle-tuning is performed. To generate these transmission values for different angles of incidence and polarizations a simulation program was created. Input data of the simulation were based on data provided by the manufacturers. Simulation results are presented for a sample of four systems. Simulation was deemed successful and accelerates the design process of the metrology system, since a large range of source and filter combinations can be evaluated swiftly. Limitations of the simulation are discussed as well.","PeriodicalId":422212,"journal":{"name":"Precision Optics Manufacturing","volume":"60 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-09-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Precision Optics Manufacturing","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2676121","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
For the design of a new asphere measuring system, it is necessary to know transmission values for a system consisting of a source, an optional auxiliary filter and an optical filter, on which angle-tuning is performed. To generate these transmission values for different angles of incidence and polarizations a simulation program was created. Input data of the simulation were based on data provided by the manufacturers. Simulation results are presented for a sample of four systems. Simulation was deemed successful and accelerates the design process of the metrology system, since a large range of source and filter combinations can be evaluated swiftly. Limitations of the simulation are discussed as well.
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