Step Modelling of a High Precision 2DoF (Linear-Angular) Microsystem

M. Rakotondrabe, Y. Haddab, P. Lutz
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引用次数: 5

Abstract

In this paper, a new type of microsystem is presented : a system able to perform linear and angular motion. First, the microactuator used is studied. An approximation of the working equations is proposed in accordance with Finite-Element simulation. The microactuator used is inserted in the microsystem and a separated modelling of the whole system in linear and in angular motion is given. Stick and skid phases of each motion are independently studied.
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高精度二自由度(线角)微系统的阶跃建模
本文提出了一种新型的微系统:既能进行直线运动又能进行角运动的微系统。首先,对所采用的微执行器进行了研究。根据有限元模拟,提出了工作方程的近似解。将所使用的微执行器插入到微系统中,并对整个系统进行了线性和角运动的分离建模。每个运动的粘和滑阶段被独立研究。
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