Optical and structural properties of V2O5 thin films

K. Sieradzka, D. Wojcieszak, D. Kaczmarek, J. Domaradzki, E. Prociów, M. Mazur, T. Berlicki
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Abstract

In this work optical and structural properties of vanadium (V) oxides in comparison with their structure have been presented. Thin films were deposited on silica substrates by plasma enhanced reactive magnetron sputtering process. After deposition manufactured films were annealed at 400 °C in order to form V2O5 structure. Optical transmission measurements have shown that as-deposited film was not transparent in visible light range and transparency was increasing in longer wavelength (in NIR range). Additional annealing at 400 °C results in increase of transparency range in VIS and in NIR range. Annealing also shifted absorption edge λcut off in to the shorter wavelength from about 750 nm to 500 nm. Investigation of the structure performed with the aid of Raman spectroscopy have revealed that as-deposited film was amorphous, while annealing results in recrystalization of the structure and forming V2O5 phase.
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V2O5薄膜的光学和结构特性
本文介绍了钒氧化物的光学性质和结构性质,并与它们的结构作了比较。采用等离子体增强反应磁控溅射技术在二氧化硅衬底上沉积薄膜。沉积后制备的薄膜在400℃下退火以形成V2O5结构。光学透射测量表明,沉积膜在可见光范围内不透明,在较长波长(近红外范围)透明度增加。在400°C下额外退火导致VIS和NIR范围的透明度范围增加。退火还使吸收边λ截止波长从750 nm左右移动到500 nm左右。利用拉曼光谱对其结构进行了研究,发现沉积膜为非晶态,而退火导致了结构的再结晶,形成了V2O5相。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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