Characteriistics Analysis and Maunfacture of Ta2O5 Thin Films Prepared by Dual Ion-beam Sputtering Deposition with Change of Ar/O2 Gas Flow Rate of Assist Ion Beam
S. Yoon, 김회경, 김근영, 이형만 김명진, 이상현, C. Hwangbo, Dae-Ho Yoon
{"title":"Characteriistics Analysis and Maunfacture of Ta2O5 Thin Films Prepared by Dual Ion-beam Sputtering Deposition with Change of Ar/O2 Gas Flow Rate of Assist Ion Beam","authors":"S. Yoon, 김회경, 김근영, 이형만 김명진, 이상현, C. Hwangbo, Dae-Ho Yoon","doi":"10.4191/kcers.2003.40.12.1165","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":387756,"journal":{"name":"The Korean Journal of Ceramics","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"The Korean Journal of Ceramics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.4191/kcers.2003.40.12.1165","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}