{"title":"Electrohydrodynamic (EHD) Micro-Boat","authors":"Jiun-Min Wang, Tzu-Yuan Lin, Lung-Jieh Yang","doi":"10.1109/NEMS.2007.352087","DOIUrl":null,"url":null,"abstract":"This paper describes about the fabrication and testing of a novel electrohydrodynamic (EHD) micro-boat using parylene MEMS technology. The driven force of micro-boat utilizes the reaction force of the EHD, with planar electrodes, to pump nonpolar liquid. As a result, by applying a DC voltage of 30-40 V the instantaneous moving velocity of the EHD micro-boat is about 6.5 mm/min.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"688 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NEMS.2007.352087","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 7
Abstract
This paper describes about the fabrication and testing of a novel electrohydrodynamic (EHD) micro-boat using parylene MEMS technology. The driven force of micro-boat utilizes the reaction force of the EHD, with planar electrodes, to pump nonpolar liquid. As a result, by applying a DC voltage of 30-40 V the instantaneous moving velocity of the EHD micro-boat is about 6.5 mm/min.
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