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2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems最新文献

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Pub Date : 2018-12-01 DOI: 10.1109/cloudcom2018.2018.00016
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引用次数: 0
Studies on MEMS Vacuum Sensor Based on Field Emission of Silicon Tips Array 基于硅尖阵场发射的MEMS真空传感器研究
Weiren Wen, Lingyun Wang, J. Gao, Daoheng Sun
In this paper, we present our recent works on the fabrication and testing of a novel MEMS (micro electro mechanical systems) vacuum sensor based on field emission of silicon tips array. The prototype vacuum sensor had been fabricated and tested under some conditions. It worked as a diode, having the voltage as the input and field emission current as output, with threshold voltage of approximate 7V and breakdown voltage of about 265V. When the pressure fell from 0.037Pa to 0.0077Pa, the field emission current increased from 80.3muA to 96.3muA. This work suggests a potential application of field emission to vacuum sensor.
本文介绍了基于硅尖端阵列场发射的新型MEMS(微机电系统)真空传感器的制造和测试工作。制作了真空传感器样机,并在一定条件下进行了测试。它作为二极管工作,电压为输入,场发射电流为输出,阈值电压约为7V,击穿电压约为265V。当压力从0.037Pa下降到0.0077Pa时,场发射电流从80.3muA增加到96.3muA。这一工作提示了场发射技术在真空传感器上的潜在应用。
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引用次数: 5
Special Invited Lectures: Microfabrication and Nanostructure Processing of Advanced Biological Systems 特邀讲座:先进生物系统的微加工和纳米结构加工
J. Ying
Microelectromechanical systems (MEMS) can be combined with nanostructured materials in the design of multifunctional devices. MEMS provide for the ease of microfluidics control, and allows for the full integration of mechanical and electrical components at the macroscopic level through a top-down approach. In contrast, nanostructured materials enable the bottom-up synthesis and assembly of molecular, supramolecular and nanometer-scale structures with controlled surface functionalization. By bringing together MEMS and nanostructured materials, we can achieve (i) automated preparation and manipulation of biological samples, (ii) high-throughput drug screening, (iii) ultrasensitive biomolecular sensors and medical diagnostics, (iv) complex bioreactors for cell and tissue engineering, and (v) biomimetic artificial organs and implants. This presentation describes the exciting possibilities of engineering advanced biological systems by combining microfabrication of devices and nanostructure processing of materials.
微机电系统(MEMS)可以与纳米结构材料相结合来设计多功能器件。MEMS提供了微流体控制的便利性,并允许通过自上而下的方法在宏观层面上完全集成机械和电气元件。相比之下,纳米结构材料能够自下而上地合成和组装具有可控表面功能化的分子、超分子和纳米级结构。通过将MEMS和纳米结构材料结合起来,我们可以实现(i)生物样品的自动制备和操作,(ii)高通量药物筛选,(iii)超灵敏的生物分子传感器和医学诊断,(iv)用于细胞和组织工程的复杂生物反应器,以及(v)仿生人工器官和植入物。本报告描述了通过结合器件的微加工和材料的纳米结构加工,工程先进生物系统的令人兴奋的可能性。
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引用次数: 0
Plenary Speech: Micro- and Nano-Technologies for Automotive Research 全体演讲:汽车研究中的微纳米技术
A. Pisano
In this talk, current and future research directions for micro- and nano-technologies applicable to the automotive sensor market will be presented. There exists an opportunity for new research to provide new micro- and nano-technologies that in the short run may not yet compete with the existing automotive sensor technologies, but in the long run are likely to surpass them. Historically, automotive sensor technology has been transitioning through three phases, from 1) early phases in which simple driver information is generated, to 2) computer-in-the-loop control systems to 3) complete driving experience mode selection. This existing technology is in phase 3, and for this phase to be successfully completed, new sensors that have higher resolution, greater bandwidth and lower cost must be developed. The new micro- and nano-technologies will provide that solution. A number of micro- and nano-sensors, currently under development, will be described and reviewed. These include 1) resonant micro strain sensors to determine the smallest deflections of even the most rigid of metal automotive parts, 2) micro sensors that show promise of measuring temperature, acceleration, pressure and strain inside the automobile engine combustion chamber, 3) nanowire and nanotube sensors made using a new, room temperature fabrication method that allows the nanowires and nanotubes to be fabricated directly on CMOS chips and 4) miniaturized, low-cost, micro RF systems to detect the presence of pedestrians in the path of the vehicle. These sensors, and others, promise to revolutionize the automotive sensor market.
本次讲座将介绍当前和未来应用于汽车传感器市场的微纳米技术的研究方向。新的研究有机会提供新的微纳米技术,这些技术在短期内可能还无法与现有的汽车传感器技术竞争,但从长远来看,可能会超过它们。从历史上看,汽车传感器技术经历了三个阶段的过渡,从1)生成简单驾驶员信息的早期阶段,到2)计算机在环控制系统,再到3)完整的驾驶体验模式选择。现有技术处于第三阶段,为了成功完成这一阶段,必须开发具有更高分辨率、更大带宽和更低成本的新型传感器。新的微纳米技术将提供这种解决方案。本文将介绍和评述目前正在开发的一些微纳米传感器。其中包括:1)谐振微应变传感器,用于确定即使是最坚硬的金属汽车部件的最小挠度;2)微传感器有望测量汽车发动机燃烧室内的温度、加速度、压力和应变;3)纳米线和纳米管传感器,采用一种新的室温制造方法,允许纳米线和纳米管直接在CMOS芯片上制造;微型射频系统,以检测车辆路径上是否存在行人。这些传感器和其他传感器有望彻底改变汽车传感器市场。
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引用次数: 0
A Bulk Micromachined Si-on-glass Tunneling Accelerometer with Out-of-plane Sensing Capability 具有面外传感能力的硅-玻璃隧道加速度计
M. Miao, Qifang Hu, Y. Hao, Haifeng Dong, Ling Wang, Yunbo Shi, Sanmin Shen
A bulk micromachined tunneling accelerometer on Pyrex 7740 glass substrate is reported in this paper, which is capable of out-of-plane sensing and intended for highly sensitive inertial measurements. Low stress in single crystal Si (SCS) proof mass-suspension structure and low thermal incompatibility between SCS structural layer and substrate can minimize low frequency noise of the device. Double-face ICP etchings are utilized to define the movable proof mass and suspension: one made on the face with the tip to partially defines the movable structure before anodic bonding, and another made to releases the movable structure after the bonding. The process can avoid severe blades, as found on beams of samples fabricated with previous process. A 3-order closed loop control circuit is used to keep the tip staying close to the optimal operation position and to ensure favorable linearity over the measuring range. Theoretical analysis and design of the control electronics are presented. The device is tested in low noise environment and the result shows an excellent low frequency resolution of 0.015mg/rtHz (@1~100Hz), and nonlinearity < 2% over plusmn10g input (<1% over plusmn 1g).
本文报道了一种基于Pyrex 7740玻璃基板的体微机械隧道加速度计,该加速度计具有面外传感能力,可用于高灵敏度的惯性测量。抗单晶硅(SCS)质量悬架结构的低应力和SCS结构层与衬底之间的低热不相容性可以最大限度地降低器件的低频噪声。双面ICP蚀刻用于定义可移动的防质量和悬浮液:一面在表面用尖端部分定义阳极键合前的可移动结构,另一面在键合后释放可移动结构。该工艺可以避免严重的叶片,如发现用以前的工艺制作的样品梁。采用三阶闭环控制电路,使尖端保持在最佳操作位置附近,并确保在测量范围内良好的线性度。对控制电子系统进行了理论分析和设计。该器件在低噪声环境下进行了测试,结果表明,该器件具有0.015mg/rtHz (@1~100Hz)的优异低频分辨率,在plusmn10g输入时非线性< 2%(在plusmn1g输入时非线性<1%)。
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引用次数: 13
An RC-Model for Dielectrophoresis of Ellipsoidal Cells: A Method for Determnination of Dielectric Properties 椭球细胞介电性能的rc -模型测定
S. Bunthawin, P. Wanichapichart
This work proposes an RC-model representing an ellipsoidal cell being induced in an AC electric field. The frequency dependent complex function of the induced cell dipole moment is expressed in terms of real and imaginary parts, which explains cell dielectric properties. This approach provides a simpler method so that only three values are required from experimentation. There are two critical frequencies at the lower (fclscr) and the higher (fch ) boundary which determine cross over points from negative to positive DEP force exerting on the cell and vice versa. By increasing the solution conductivity (sigmas), these frequencies converge and join as soon as the sigmas, reaches a critical value(sigmact). Under this critical conductivity the cell experiences a zero force, and the conductivity of the cytoplasm (sigmac) can be predicted. This work reveals permittivity and conductivity of the membrane and the cytoplasm of yeasts.
本文提出了一个代表椭球细胞在交流电场中被感应的rc模型。用实部和虚部表示了细胞偶极矩的频率相关复函数,解释了细胞的介电特性。这种方法提供了一种更简单的方法,因此实验只需要三个值。在较低(fclscr)和较高(fch)边界处有两个临界频率,它们决定了从负到正的DEP力施加在细胞上的交叉点,反之亦然。通过增加溶液电导率(sigma),这些频率在sigma达到临界值(sigact)时收敛并结合。在这个临界电导率下,细胞经历一个零力,并且细胞质的电导率(sigmac)可以预测。这项工作揭示了膜和酵母细胞质的介电常数和电导率。
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引用次数: 2
Experimental Study on Resonant Response of Piezoresistive Double-clamped (111)-Si Nano-beam 压阻式双箝位(111)-Si纳米梁谐振响应的实验研究
Quanbin Zhao, J. Jiao, Heng Yang, Fei Duan, Zixin Lin, Tie Li, Ying Zhang, Yuelin Wang
In this work, the resonant response of piezoresistive double-clamped silicon nano-beam has been investigated. Conventional DRIE and KOH anisotropic etching were used to fabricate the 242 nm thick nano beam from doped (111) Si substrate. High energy argon ion bombardment was then applied on selected area of the top side of the nano beam to destroy the symmetry along thickness direction as atomic bonds were partly broken at top layer. The unbombarded layer underneath could maintain its piezoresistivity. The localized piezoresistor was used to study the resonant response of the double-clamped Si nanobeam in air and vacuum. The resonant frequency and Q-factor were obtained. Frequency shift to low end has been observed. The energy dissipation led by damaged atomic structure is discussed to explain the unexpected low Q factor.
本文研究了压阻式双箝位硅纳米梁的谐振响应。采用传统的DRIE和KOH各向异性刻蚀技术,在掺杂(111)Si衬底上制备了242 nm厚的纳米光束。利用高能氩离子轰击纳米束顶部的选定区域,破坏纳米束沿厚度方向的对称性,破坏纳米束顶部原子键的部分断裂。下面未受轰击的层可以保持其压阻性。采用局域压敏电阻研究了双箝位硅纳米梁在空气和真空中的谐振响应。得到了谐振频率和q因子。已经观察到低频移。讨论了原子结构损坏导致的能量耗散,以解释意外的低Q因子。
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引用次数: 1
Antibacterial Effect of apatite coated Titanium Dioxide for Textiles and Coating Applications 磷灰石涂层二氧化钛在纺织品及涂料中的抗菌效果
S. Surassmo, Vichuta Lauruengtana, Wiyong Kangwansupamongkol, U. Ruktanonchai
Photocatalytic activity of titanium dioxide on thin coatings of the material exhibiting self cleaning and disinfecting properties under exposure to UV radiation, have been widely acknowledged. In this study apatite-coated TiO2 materials were evaluated in terms of its antimicrobial property both under ultraviolet (UV) and visible light. Our results demonstrate antibacterial performance of the TiO2 against 4 types of bacteria under UV/visible light at varying extents. We also proved that this coating technique can be applied effectively to fabric surfaces since its antibacterial ability under UV/visible light remain unchanged.
在紫外辐射下,二氧化钛在具有自清洁和消毒性能的材料薄膜上的光催化活性已得到广泛认可。本研究对磷灰石包覆TiO2材料在紫外线和可见光下的抗菌性能进行了评价。实验结果表明,TiO2在紫外/可见光下对4种细菌具有不同程度的抑菌性能。我们还证明了这种涂层技术可以有效地应用于织物表面,因为它在紫外线/可见光下的抗菌能力保持不变。
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引用次数: 2
Micro Fluidic System by Integrating Pressure Sensor Arrays with a Micro-Channel 集成压力传感器阵列和微通道的微流体系统
H. Ko, C.W. Liu, C.G. Liu, C. Gau
This fabrication process developed in the current paper is almost the reverse of the surface micromachining process usually used for the microchannel system. This allows the use of SU-8 to fabricate, by lithography, the diaphragm and the cavities used for these pressure sensors, and the channel. The fabrication process has many advantages over others, such as completely absence of diaphragm stiction, allowing much wider measurement range and flow conditions. More detailed design and fabrication techniques developed, and the calibration of sensors for this channel system is presented. The pressure distributions measured along the channel are compared with the analysis.
本文开发的这种制造工艺几乎与通常用于微通道系统的表面微加工工艺相反。这允许使用SU-8通过光刻技术制造用于这些压力传感器的隔膜和腔体以及通道。与其他制造工艺相比,该制造工艺具有许多优点,例如完全没有膜片粘连,允许更宽的测量范围和流动条件。提出了更详细的设计和制造技术,并介绍了该通道系统的传感器校准。实测的压力分布与分析结果进行了比较。
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引用次数: 0
Electronic Detection of Micro RNA Mir2O6 with Molecularly-Differentiated Nanoelectrodes 分子分化纳米电极对微RNA Mir2O6的电子检测
Jianchun Dong, A. Asawachaicharn, S. Tapscott, B. Parviz
Micro RNAs (miRNAs) play important roles in gene regulation at the translational level. However up to this date, there still lacks a fast and efficient method for its detection and quantification. In this paper, we present the construction and characterization of a nanoelectrode sensor array capable of detecting the presence of micro RNA (miRNA) molecules and directly converting their hybridization with an immobilized probe into an electrical signal. Each sensing unit in the array consists of three nano-scale electrodes: counter, control, and working. Electrochemical desorption is used to program the attachment of DNA oligonucleotides complementary to the target miRNA on the working electrode and a nonfouling poly(ethyleneglycol) (PEG) terminated molecular monolayer on the control and counter electrodes. The current flowing between the electrodes is monitored and the capture and hybridization of the target miRNA is verified via measurement of the differential conductance signals.
微rna (miRNAs)在翻译水平的基因调控中起着重要作用。但迄今为止,仍缺乏一种快速有效的检测和定量方法。在本文中,我们介绍了一种纳米电极传感器阵列的构建和表征,该阵列能够检测微RNA (miRNA)分子的存在,并直接将其与固定探针的杂交转化为电信号。阵列中的每个传感单元由三个纳米级电极组成:计数器、控制和工作电极。电化学解吸用于编程与目标miRNA互补的DNA寡核苷酸在工作电极上的附着,以及在对照电极和反电极上的无污染聚乙二醇(PEG)端接分子单层。监测电极之间的电流流动,并通过测量差分电导信号验证目标miRNA的捕获和杂交。
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引用次数: 1
期刊
2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems
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