Yu-Wei Lin, Seungbae Lee, Sheng-Shian Li, Yuan Xie, Z. Ren, C. Nguyen
{"title":"60-MHz wine-glass micromechanical-disk reference oscillator","authors":"Yu-Wei Lin, Seungbae Lee, Sheng-Shian Li, Yuan Xie, Z. Ren, C. Nguyen","doi":"10.1109/ISSCC.2004.1332724","DOIUrl":null,"url":null,"abstract":"A reference oscillator utilizing a 60MHz, MEMS-based, wine glass disk vibrating micromechanical resonator with a Q of 48,000 and sufficient power handling capability to achieve a far-from-carrier phase noise of -130dBc/Hz is demonstrated. When divided down to 10MHz, this corresponds to an effective level of -145dBc/Hz.","PeriodicalId":273317,"journal":{"name":"2004 IEEE International Solid-State Circuits Conference (IEEE Cat. No.04CH37519)","volume":"496 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2004-09-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"65","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2004 IEEE International Solid-State Circuits Conference (IEEE Cat. No.04CH37519)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISSCC.2004.1332724","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 65
Abstract
A reference oscillator utilizing a 60MHz, MEMS-based, wine glass disk vibrating micromechanical resonator with a Q of 48,000 and sufficient power handling capability to achieve a far-from-carrier phase noise of -130dBc/Hz is demonstrated. When divided down to 10MHz, this corresponds to an effective level of -145dBc/Hz.
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