Rong Ma, Meiju Zhang, Zhongkai Zhang, Manguo Huang, Xiaobo Liang, Jiangjiang Liu, Zhaojun Liu, B. Tian
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引用次数: 0
Abstract
The design, fabrication, testing and implementation of a new high-performance tungsten-rhenium thin film thermocouple are introduced. In this paper, tungsten-rhenium TFTCs are taken as the research object, after simulation analysis in COMSOL software and design, it is made by screen-printing technology and magnetron sputtering. This kind of thin film thermocouple primarily utilizes two kinds of electrode materials with varying composition combination, mainly tungsten with 5% rhenium and tungsten with 26% rhenium. Furthermore, high-temperature annealing is performed to maintain the mechanical properties and thus improve thermoelectric performance. The results demonstrate that the performance is reliable in the temperature range of 150-600 C° with a repeatability of 2.02%, providing application value for high-temperature in-situ sensing.
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