{"title":"Effects of temperature on frequency properties of FBAR","authors":"Dejin Huang, Ji Wang","doi":"10.1109/SPAWDA.2014.6998603","DOIUrl":null,"url":null,"abstract":"This paper investigated the effects of temperature on resonance properties of Film Bulk Acoustic Resonator (FBAR) in thickness-stretch mode. Based on the fundamental piezoelastic equations of piezoelectric material, the vibration equation of ideal FBAR under sine excitation voltage is derived. The solution is then obtained by using of the boundary conditions. The series and parallel resonance frequency were presented, and the effects of temperature on resonance frequency, bandwidth, and effective electromechanical coupling coefficient were discussed. A numerical example was presented to show the effects. These results are useful for the improvement of designing FBAR.","PeriodicalId":412736,"journal":{"name":"Proceedings of the 2014 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications","volume":"518 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-12-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 2014 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SPAWDA.2014.6998603","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
This paper investigated the effects of temperature on resonance properties of Film Bulk Acoustic Resonator (FBAR) in thickness-stretch mode. Based on the fundamental piezoelastic equations of piezoelectric material, the vibration equation of ideal FBAR under sine excitation voltage is derived. The solution is then obtained by using of the boundary conditions. The series and parallel resonance frequency were presented, and the effects of temperature on resonance frequency, bandwidth, and effective electromechanical coupling coefficient were discussed. A numerical example was presented to show the effects. These results are useful for the improvement of designing FBAR.
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