A view to recent developments in thermoelectric sensors

R. Fettig
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引用次数: 2

Abstract

Different types of thermoelectric radiation detectors are presented, as well as sensors like AC-power sensors, and gas pressure sensors. The suitability of thermoelectric radiation detectors for different applications is discussed and compared to photon detectors and other thermal detectors. In a systematic order, the characteristics of different device production techniques, of different thin thermoelectric films, and of different devices are listed, and their potential for further developments is discussed. The combination of thermoelectric materials and CMOS technology gave, and gives exciting new impulses to the field. For that reason, this subject is a dominant part of the paper.
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热电传感器的最新发展
介绍了不同类型的热电辐射探测器,以及交流电源传感器和气体压力传感器等传感器。讨论了热电辐射探测器在不同应用中的适用性,并与光子探测器和其他热探测器进行了比较。以系统的顺序,列出了不同器件生产技术、不同热电薄膜和不同器件的特点,并讨论了它们进一步发展的潜力。热电材料与CMOS技术的结合给该领域带来了令人兴奋的新推动力。因此,这一主题是本文的主要部分。
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