New Semiconductor Structure Capacity Measurement Method using the Differential Amplifier

N.G. Zaycev
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Abstract

A new method of measurement of capacity of semiconductor structures is presented.. The methodic design reasoning is shown. The developed method has some advantages over the balance schemes and schemes of capacity divisor. It has linear capacity-voltage relationship on the output of measuring circuit
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利用差分放大器测量半导体结构容量的新方法
提出了一种测量半导体结构容量的新方法。给出了系统的设计推理。该方法与平衡方案和容量除数方案相比,具有一定的优越性。它在测量电路的输出端呈线性容压关系
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