{"title":"Modeling and simulation for dual stage system using bond graph theory","authors":"Weijun Wang, Dongik Shin, Changsoo Han, Hyeonseok Choi","doi":"10.1109/ISOT.2009.5326087","DOIUrl":null,"url":null,"abstract":"The dual stage manipulator is composed of the voice coil motor (VCM) and piezoelectric ceramics transducer (PZT), which can produce the high precise displacement and express a well dynamic performance. However, inaccurate modeling of the dual stage exacerbates the positioning accuracy. This paper presents an approach to model the dual stage system using bond graph theory, and then derives the state space equations through the bond graph straightforwardly, which can be used in compute simulations.","PeriodicalId":366216,"journal":{"name":"2009 International Symposium on Optomechatronic Technologies","volume":"117 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2009-11-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2009 International Symposium on Optomechatronic Technologies","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISOT.2009.5326087","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 4
Abstract
The dual stage manipulator is composed of the voice coil motor (VCM) and piezoelectric ceramics transducer (PZT), which can produce the high precise displacement and express a well dynamic performance. However, inaccurate modeling of the dual stage exacerbates the positioning accuracy. This paper presents an approach to model the dual stage system using bond graph theory, and then derives the state space equations through the bond graph straightforwardly, which can be used in compute simulations.
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