首页 > 最新文献

2009 International Symposium on Optomechatronic Technologies最新文献

英文 中文
Graphene as thin film infrared optoelectronic sensor 石墨烯薄膜红外光电传感器
Pub Date : 2009-11-10 DOI: 10.1109/ISOT.2009.5326118
G. Hwang, J. C. Acosta, E. Vela, S. Haliyo, Stephane Regnier1
We present the conductometric behavior of a single atomic carbon nanostructure (graphene) that could be promising to infrared optoelectronic applications. A graphene nanomanipulation system with focused infrared laser source for optoelectronic property characterizations is implemented. The feasibility of mechanical and electrical probing manipulations on two-dimensional thin film nanostructures is studied. Using this system, we revealed the infrared optoelectronic properties of mono- and multilayer graphene. The obtained optoelectronic parameters are compared to the single- and multi-walled nanotubes. A graphene infrared sensor is prototyped by direct writing of electrodes using gold nanoink fountain-pen method and is analyzed by electrical probing. Results show that graphene could be a promising building block for thin film optoelectronic devices.
我们提出了一种单原子碳纳米结构(石墨烯)的电导行为,该结构有望用于红外光电应用。实现了一种具有聚焦红外激光源的石墨烯纳米操作系统,用于光电特性表征。研究了在二维薄膜纳米结构上进行机械和电探针操作的可行性。利用该系统,我们揭示了单层和多层石墨烯的红外光电特性。得到的光电参数与单壁和多壁纳米管进行了比较。采用金纳米墨水钢笔法直接写入电极,制作了一种石墨烯红外传感器原型,并进行了电探针分析。结果表明,石墨烯有望成为薄膜光电器件的重要组成部分。
{"title":"Graphene as thin film infrared optoelectronic sensor","authors":"G. Hwang, J. C. Acosta, E. Vela, S. Haliyo, Stephane Regnier1","doi":"10.1109/ISOT.2009.5326118","DOIUrl":"https://doi.org/10.1109/ISOT.2009.5326118","url":null,"abstract":"We present the conductometric behavior of a single atomic carbon nanostructure (graphene) that could be promising to infrared optoelectronic applications. A graphene nanomanipulation system with focused infrared laser source for optoelectronic property characterizations is implemented. The feasibility of mechanical and electrical probing manipulations on two-dimensional thin film nanostructures is studied. Using this system, we revealed the infrared optoelectronic properties of mono- and multilayer graphene. The obtained optoelectronic parameters are compared to the single- and multi-walled nanotubes. A graphene infrared sensor is prototyped by direct writing of electrodes using gold nanoink fountain-pen method and is analyzed by electrical probing. Results show that graphene could be a promising building block for thin film optoelectronic devices.","PeriodicalId":366216,"journal":{"name":"2009 International Symposium on Optomechatronic Technologies","volume":"40 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-11-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117184292","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 15
Optical blocking of microfluidic droplets through laser-induced thermocapillarity 激光诱导热毛细效应对微流控液滴的光学阻挡作用
Pub Date : 2009-11-10 DOI: 10.1109/ISOT.2009.5326157
E. Verneuil, M. Cordero, F. Gallaire, C. Baroud
The localized heating produced by a tightly focused infrared laser leads to surface tension gradients at the interface of microfluidic drops, resulting in a net force on the drop whose origin and magnitude are the focus of this paper. First, by co-localization of the surfactant micelles with a fluorescent dye, we demonstrate that the heating alters their spatial distribution, driving the interface out of thermodynamic equilibrium. This soluto-capillary effect opposes and overcomes the purely thermal dependence of the surface tension, leading to anomalous Marangoni flows. This sets the interface into motion and creates recirculation rolls outside and inside the drop, which we measure using time-resolved micro-Particle Image Velocimetry. Second, the net force produced on the drop is measured to be in the range of a few hundred nN by using an original microfluidic design. This micro-dynanometer further shows that the magnitude of the heating, which is determined by the laser power and its absorption in the water, sets the magnitude of the net force on the drop. On the other hand, the dynamics of the force generation is determined by the time scale for heating which is independently measured to be τΘ = 4 ms. This time scale sets the maximum velocity that the drops can have and still be blocked, by requiring that the interface pass the laser spot in a time longer than τΘ. The maximum velocity is measured at Umax = 0.7 mm/s for our geometric conditions. Finally, a simple model is derived that describes the blocking force in a confined geometry as the result of the viscous stresses produced between the drop and the lateral walls.
紧聚焦红外激光产生的局部加热导致微流控液滴界面产生表面张力梯度,从而对微流控液滴产生净力,其来源和大小是本文研究的重点。首先,通过表面活性剂胶束与荧光染料的共定位,我们证明了加热改变了它们的空间分布,使界面脱离热力学平衡。这种溶液-毛细效应反对并克服了表面张力的纯粹热依赖性,导致了反常的马兰戈尼流动。这使得界面开始运动,并在液滴内外产生再循环卷,我们使用时间分辨微粒子图像测速仪进行测量。其次,通过使用原始的微流体设计,测量了液滴上产生的净力在几百nN的范围内。这一微动态纳米进一步表明,由激光功率及其在水中的吸收决定的加热幅度决定了水滴所受净力的大小。另一方面,力产生的动力学是由加热的时间尺度决定的,独立测量为τΘ = 4 ms。这个时间尺度通过要求界面在超过τΘ的时间内通过激光光斑,设定了液滴可以具有且仍然被阻挡的最大速度。在我们的几何条件下,测量到的最大速度为Umax = 0.7 mm/s。最后,推导了一个简单的模型,该模型描述了由于液滴和侧壁之间产生的粘性应力而产生的封闭几何中的阻塞力。
{"title":"Optical blocking of microfluidic droplets through laser-induced thermocapillarity","authors":"E. Verneuil, M. Cordero, F. Gallaire, C. Baroud","doi":"10.1109/ISOT.2009.5326157","DOIUrl":"https://doi.org/10.1109/ISOT.2009.5326157","url":null,"abstract":"The localized heating produced by a tightly focused infrared laser leads to surface tension gradients at the interface of microfluidic drops, resulting in a net force on the drop whose origin and magnitude are the focus of this paper. First, by co-localization of the surfactant micelles with a fluorescent dye, we demonstrate that the heating alters their spatial distribution, driving the interface out of thermodynamic equilibrium. This soluto-capillary effect opposes and overcomes the purely thermal dependence of the surface tension, leading to anomalous Marangoni flows. This sets the interface into motion and creates recirculation rolls outside and inside the drop, which we measure using time-resolved micro-Particle Image Velocimetry. Second, the net force produced on the drop is measured to be in the range of a few hundred nN by using an original microfluidic design. This micro-dynanometer further shows that the magnitude of the heating, which is determined by the laser power and its absorption in the water, sets the magnitude of the net force on the drop. On the other hand, the dynamics of the force generation is determined by the time scale for heating which is independently measured to be τΘ = 4 ms. This time scale sets the maximum velocity that the drops can have and still be blocked, by requiring that the interface pass the laser spot in a time longer than τΘ. The maximum velocity is measured at Umax = 0.7 mm/s for our geometric conditions. Finally, a simple model is derived that describes the blocking force in a confined geometry as the result of the viscous stresses produced between the drop and the lateral walls.","PeriodicalId":366216,"journal":{"name":"2009 International Symposium on Optomechatronic Technologies","volume":"31 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-11-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121105988","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Estimating the position of parts of an automobile cowl cross bar assembly using CCD camera 利用CCD相机对汽车前罩横杆总成进行零件位置估计
Pub Date : 2009-11-10 DOI: 10.1109/ISOT.2009.5326130
Yongsoo Jang, Soon‐Geul Lee, D. Cha, Je-Hyung Moon
This paper realized an inspection system of the cowl cross assembly which is an automotive part using single CCD camera. Edge is extracted by Sobel operator after improving image quality with homomorphic filter. The unnecessary segments and the unnecessary edge elements are removed from the obtained edge image by labeling. The accurate center of the merged segment can be estimated using RHT (Randomized Hough Transform). Existence of defect can be decided by comparing the CAD information of the cowl cross assembly with the estimated center position. Efficiency of the proposed method was proven by accurate inspection result for various target images at the poor environment such as the real industrial field
本文利用单CCD摄像机实现了汽车整流罩十字总成的检测系统。通过同态滤波提高图像质量,利用Sobel算子提取边缘。通过标记去除边缘图像中不需要的部分和不需要的边缘元素。利用随机霍夫变换(RHT)可以估计合并后片段的准确中心。将前盖十字总成的CAD信息与预估的中心位置进行比较,可以判断是否存在缺陷。通过对实际工业现场等恶劣环境下的各种目标图像进行精确检测,验证了该方法的有效性
{"title":"Estimating the position of parts of an automobile cowl cross bar assembly using CCD camera","authors":"Yongsoo Jang, Soon‐Geul Lee, D. Cha, Je-Hyung Moon","doi":"10.1109/ISOT.2009.5326130","DOIUrl":"https://doi.org/10.1109/ISOT.2009.5326130","url":null,"abstract":"This paper realized an inspection system of the cowl cross assembly which is an automotive part using single CCD camera. Edge is extracted by Sobel operator after improving image quality with homomorphic filter. The unnecessary segments and the unnecessary edge elements are removed from the obtained edge image by labeling. The accurate center of the merged segment can be estimated using RHT (Randomized Hough Transform). Existence of defect can be decided by comparing the CAD information of the cowl cross assembly with the estimated center position. Efficiency of the proposed method was proven by accurate inspection result for various target images at the poor environment such as the real industrial field","PeriodicalId":366216,"journal":{"name":"2009 International Symposium on Optomechatronic Technologies","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-11-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123710339","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Analysis of one-dimensional Fibonacci-class quasicrystals using perturbation theory 用微扰理论分析一维斐波那契类准晶体
Pub Date : 2009-11-10 DOI: 10.1109/ISOT.2009.5326071
A. Rostami, S. Matloub, F. J. Sharifi
In this work, we present a new and semi-analytical method to investigate one dimensional Fibonacci-class photonic quasicrystals as an optical waveguide. Usually, the exact method for obtaining band diagram in these situations is very hard and the numerical methods are used. In this paper, we investigate the band structure characteristics of one-dimensional quasicrystals by using perturbation method. In this direction, the band diagram and field distribution of this structure are obtained.
在这项工作中,我们提出了一种新的半解析方法来研究作为光波导的一维斐波那契类光子准晶体。通常,在这种情况下,很难精确地获得带图,而采用数值方法。本文用微扰法研究了一维准晶体的能带结构特征。在这个方向上,得到了该结构的能带图和场分布。
{"title":"Analysis of one-dimensional Fibonacci-class quasicrystals using perturbation theory","authors":"A. Rostami, S. Matloub, F. J. Sharifi","doi":"10.1109/ISOT.2009.5326071","DOIUrl":"https://doi.org/10.1109/ISOT.2009.5326071","url":null,"abstract":"In this work, we present a new and semi-analytical method to investigate one dimensional Fibonacci-class photonic quasicrystals as an optical waveguide. Usually, the exact method for obtaining band diagram in these situations is very hard and the numerical methods are used. In this paper, we investigate the band structure characteristics of one-dimensional quasicrystals by using perturbation method. In this direction, the band diagram and field distribution of this structure are obtained.","PeriodicalId":366216,"journal":{"name":"2009 International Symposium on Optomechatronic Technologies","volume":"86 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-11-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129073888","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Organic optofluidic devices produced by femtosecond laser micromachining 飞秒激光微加工有机光流器件
Pub Date : 2009-11-10 DOI: 10.1109/ISOT.2009.5326149
K. Vishnubhatla, A. Crespi, N. Bellini, J. Clark, G. Lanzani, R. Ramponi, R. Osellame, T. Virgili
We report on innovative application of microchannels, fabricated by femtosecond laser irradiation followed by chemical etching. This technique allows us to demonstrate a novel approach to the achievement of organic photonic devices, where the unique properties of a conjugated polymer in solution are exploited in a microfluidic configuration in order to produce an easy-to-integrate photonic device. Filling the microchannel with a diluted polyfluorene solution and by dispersing nanoparticles in the solution we are able to achieve random lasing in the microchannel.
本文报道了飞秒激光辐照后化学蚀刻制备微通道的创新应用。这项技术使我们能够展示一种实现有机光子器件的新方法,其中在微流控配置中利用溶液中共轭聚合物的独特性质,以生产易于集成的光子器件。用稀释的聚芴溶液填充微通道,并将纳米粒子分散在溶液中,我们能够在微通道中实现随机激光。
{"title":"Organic optofluidic devices produced by femtosecond laser micromachining","authors":"K. Vishnubhatla, A. Crespi, N. Bellini, J. Clark, G. Lanzani, R. Ramponi, R. Osellame, T. Virgili","doi":"10.1109/ISOT.2009.5326149","DOIUrl":"https://doi.org/10.1109/ISOT.2009.5326149","url":null,"abstract":"We report on innovative application of microchannels, fabricated by femtosecond laser irradiation followed by chemical etching. This technique allows us to demonstrate a novel approach to the achievement of organic photonic devices, where the unique properties of a conjugated polymer in solution are exploited in a microfluidic configuration in order to produce an easy-to-integrate photonic device. Filling the microchannel with a diluted polyfluorene solution and by dispersing nanoparticles in the solution we are able to achieve random lasing in the microchannel.","PeriodicalId":366216,"journal":{"name":"2009 International Symposium on Optomechatronic Technologies","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-11-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134421401","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Optical free-space communication systems in the Mbps to Gbps range, suitable for industrial applications 在Mbps到Gbps范围内的光学自由空间通信系统,适用于工业应用
Pub Date : 2009-11-10 DOI: 10.1109/ISOT.2009.5326134
A. Paraskevopoulos, J. Vucic, Sven-Hendrik Voss, K. Langer
For future short- and mid-range industrial applications, optical free-space communication systems are expected to play a major role. When moderate transmission rates (100 Mbps range) are required, optical wireless communications present a viable and promising technology supplemental to conventional radio wireless systems. Advanced approaches based on diversity techniques and adaptive signal processing show potential to achieve both high spatial coverage and high bit rates of more than 100 Mbps. Visible light communication systems using white phosphorescent LEDs present equally an interesting application potential, combining illumination with data transfer. When high data volumes (100 Gbps range) need to be transmitted, tailored optical data links provide a solution of choice. Exemplarily, a scalable (24 – 140 Gbps) optical data link is presented, developed for future implementation in maskless lithography systems. The link comprises a high-speed data buffer with synchronizable architecture and scalable throughput (N x 24 Gbps), an optical free space transmission solution, and, finally, a 45 channel low-noise optical receiver chip based on BiCMOS 0.6 µm technology.
在未来的中短期工业应用中,光自由空间通信系统有望发挥重要作用。当需要中等传输速率(100mbps范围)时,光无线通信是传统无线电无线系统的一种可行且有前途的补充技术。基于分集技术和自适应信号处理的先进方法显示出实现高空间覆盖和超过100 Mbps的高比特率的潜力。使用白光磷光led的可见光通信系统将照明与数据传输相结合,同样具有有趣的应用潜力。当需要传输大数据量(100gbps范围)时,定制的光数据链路提供了一个选择的解决方案。例如,提出了一种可扩展的(24 - 140 Gbps)光数据链路,为将来在无掩模光刻系统中实现而开发。该链路包括具有可同步架构和可扩展吞吐量(N x 24 Gbps)的高速数据缓冲器,光自由空间传输解决方案,以及基于BiCMOS 0.6µm技术的45通道低噪声光接收器芯片。
{"title":"Optical free-space communication systems in the Mbps to Gbps range, suitable for industrial applications","authors":"A. Paraskevopoulos, J. Vucic, Sven-Hendrik Voss, K. Langer","doi":"10.1109/ISOT.2009.5326134","DOIUrl":"https://doi.org/10.1109/ISOT.2009.5326134","url":null,"abstract":"For future short- and mid-range industrial applications, optical free-space communication systems are expected to play a major role. When moderate transmission rates (100 Mbps range) are required, optical wireless communications present a viable and promising technology supplemental to conventional radio wireless systems. Advanced approaches based on diversity techniques and adaptive signal processing show potential to achieve both high spatial coverage and high bit rates of more than 100 Mbps. Visible light communication systems using white phosphorescent LEDs present equally an interesting application potential, combining illumination with data transfer. When high data volumes (100 Gbps range) need to be transmitted, tailored optical data links provide a solution of choice. Exemplarily, a scalable (24 – 140 Gbps) optical data link is presented, developed for future implementation in maskless lithography systems. The link comprises a high-speed data buffer with synchronizable architecture and scalable throughput (N x 24 Gbps), an optical free space transmission solution, and, finally, a 45 channel low-noise optical receiver chip based on BiCMOS 0.6 µm technology.","PeriodicalId":366216,"journal":{"name":"2009 International Symposium on Optomechatronic Technologies","volume":"35 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-11-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131814482","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Application of AZARASHI (seal) positioning mechanism to micromanipulation by vacuum suction 密封定位机构在真空吸微操作中的应用
Pub Date : 2009-11-10 DOI: 10.1109/ISOT.2009.5326100
K. Furutani, T. Makino
This paper deals with an application of a small mobile device, “AZARASHI (seal) Mechanism” with three degrees of freedom (DOFs) to a micromanipulation device. AZARASHI mechanism has a smaller number of controlled devices than the inchworm-like device. The small device with multiple DOFs can be built by combining such mechanism. A micromanipulation device consists of an L-shaped device for the x-, y- and θ-motions, and one-DOF device in the z-motion. By the visual feedback, a glass bead is placed automatically. In order to trap a glass bead with a diameter of 60–70 µm, the air was gently sucked through the glass capillary. Then the bead is trapped and placed after moving the stage. Finally, the bead is placed. The performance of the manipulation device was measured. Positioning accuracy of the stage was within 1 pixel. However, a process of the bead release often disturbed the total accuracy.
本文讨论了一种小型移动装置“三自由度密封机构”在微操纵装置上的应用。AZARASHI机构的控制装置数量比尺蠖式装置少。将这两种机构组合在一起,就可以制造出具有多个自由度的小型装置。微操纵装置由用于x、y和θ运动的l形装置和用于z运动的单自由度装置组成。通过视觉反馈,自动放置玻璃珠。为了捕获直径为60-70µm的玻璃珠,空气通过玻璃毛细管轻轻吸入。然后,在移动舞台后,珠子被困住并放置。最后,放置头。对操纵装置的性能进行了测试。平台定位精度在1像素以内。然而,一个过程的头释放往往干扰总精度。
{"title":"Application of AZARASHI (seal) positioning mechanism to micromanipulation by vacuum suction","authors":"K. Furutani, T. Makino","doi":"10.1109/ISOT.2009.5326100","DOIUrl":"https://doi.org/10.1109/ISOT.2009.5326100","url":null,"abstract":"This paper deals with an application of a small mobile device, “AZARASHI (seal) Mechanism” with three degrees of freedom (DOFs) to a micromanipulation device. AZARASHI mechanism has a smaller number of controlled devices than the inchworm-like device. The small device with multiple DOFs can be built by combining such mechanism. A micromanipulation device consists of an L-shaped device for the x-, y- and θ-motions, and one-DOF device in the z-motion. By the visual feedback, a glass bead is placed automatically. In order to trap a glass bead with a diameter of 60–70 µm, the air was gently sucked through the glass capillary. Then the bead is trapped and placed after moving the stage. Finally, the bead is placed. The performance of the manipulation device was measured. Positioning accuracy of the stage was within 1 pixel. However, a process of the bead release often disturbed the total accuracy.","PeriodicalId":366216,"journal":{"name":"2009 International Symposium on Optomechatronic Technologies","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-11-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131095613","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Impact of angle ranges on thickness resolution in thin film reflectometry 薄膜反射测量中角度范围对厚度分辨率的影响
Pub Date : 2009-11-10 DOI: 10.1109/ISOT.2009.5326107
F. Hirth, M. Rossner, M. Jakobi, A. Koch
Thin film reflectometry is a common way to monitor film thicknesses in numerous processes. Semiconductor and optics producing industries, e.g., require film thickness observation. Spectral reflectometry interrogation is one of several methods, which can be assessed by various algorithms depending on resolution and measuring range demands. Incident angle is a crucial parameter to these interrogation methods. Light, under different incident angles, produces different spectral reflectivity functions. These are integrated by a detector, in this case a spectrograph. Therefore, one needs to minimize the range of incident angles onto the measured object in order to increase the resolution of film thickness. Lateral resolution may also be a crucial parameter in some processes. Lateral resolution is a function of the range of incident angle, it increases with increasing angle range. These two crucial facts result in an estimate of measuring error introduced by the angle range under a given maximal lateral resolution. A measuring setup for a range of incident angle measurements is presented, as well as an example interrogation of a thin film under different incident angles.
薄膜反射法是众多工艺中监测薄膜厚度的常用方法。例如,半导体和光学生产行业需要薄膜厚度观察。光谱反射法是几种方法中的一种,可以根据分辨率和测量范围的要求通过各种算法进行评估。入射角是这些讯问方法的关键参数。光在不同入射角下,产生不同的光谱反射率函数。这些都是由一个探测器集成的,在这个例子中是一个摄谱仪。因此,人们需要最小化入射角的范围到被测物体,以增加膜厚度的分辨率。横向分辨率在某些过程中也可能是一个关键参数。横向分辨率是入射角范围的函数,随入射角范围的增大而增大。这两个关键事实导致了在给定最大横向分辨率下由角度范围引入的测量误差的估计。介绍了一种测量入射角范围的装置,并给出了不同入射角下薄膜的测量实例。
{"title":"Impact of angle ranges on thickness resolution in thin film reflectometry","authors":"F. Hirth, M. Rossner, M. Jakobi, A. Koch","doi":"10.1109/ISOT.2009.5326107","DOIUrl":"https://doi.org/10.1109/ISOT.2009.5326107","url":null,"abstract":"Thin film reflectometry is a common way to monitor film thicknesses in numerous processes. Semiconductor and optics producing industries, e.g., require film thickness observation. Spectral reflectometry interrogation is one of several methods, which can be assessed by various algorithms depending on resolution and measuring range demands. Incident angle is a crucial parameter to these interrogation methods. Light, under different incident angles, produces different spectral reflectivity functions. These are integrated by a detector, in this case a spectrograph. Therefore, one needs to minimize the range of incident angles onto the measured object in order to increase the resolution of film thickness. Lateral resolution may also be a crucial parameter in some processes. Lateral resolution is a function of the range of incident angle, it increases with increasing angle range. These two crucial facts result in an estimate of measuring error introduced by the angle range under a given maximal lateral resolution. A measuring setup for a range of incident angle measurements is presented, as well as an example interrogation of a thin film under different incident angles.","PeriodicalId":366216,"journal":{"name":"2009 International Symposium on Optomechatronic Technologies","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-11-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131115327","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Miniaturized FR4 spectrometers 小型化FR4光谱仪
Pub Date : 2009-11-10 DOI: 10.1109/ISOT.2009.5326116
H. Seren, O. Ferhanoğlu, G. Hatipoglu, Michel Boyman, S. Olcer, Ç. Ataman, H. Urey
A miniaturized and electromagnetically driven FR4 based moving platform is developed for Fourier Transform spectrometer applications. Both Michelson interferometer and Lamellar Grating interferometer configurations are demonstrated. ±500 µm translational motion (corresponding to 5 cm−1 spectral resolution) is demonstrated with the moving platform. Two methods are proposed and partially demonstrated for pure translational motion: (1) integrated control system using a quad photo detector feedback and (2) corner cube retroreflector. The fundamental advantages and the limits of the lamellar grating interferometers are also discussed.
研制了一种用于傅里叶变换光谱仪的小型化电磁驱动FR4移动平台。演示了迈克尔逊干涉仪和片层光栅干涉仪的结构。移动平台演示了±500µm平移运动(对应于5 cm−1光谱分辨率)。针对纯平移运动,提出并部分论证了两种方法:(1)采用四光电探测器反馈的集成控制系统和(2)角立方反射镜。讨论了片层光栅干涉仪的基本优点和局限性。
{"title":"Miniaturized FR4 spectrometers","authors":"H. Seren, O. Ferhanoğlu, G. Hatipoglu, Michel Boyman, S. Olcer, Ç. Ataman, H. Urey","doi":"10.1109/ISOT.2009.5326116","DOIUrl":"https://doi.org/10.1109/ISOT.2009.5326116","url":null,"abstract":"A miniaturized and electromagnetically driven FR4 based moving platform is developed for Fourier Transform spectrometer applications. Both Michelson interferometer and Lamellar Grating interferometer configurations are demonstrated. ±500 µm translational motion (corresponding to 5 cm−1 spectral resolution) is demonstrated with the moving platform. Two methods are proposed and partially demonstrated for pure translational motion: (1) integrated control system using a quad photo detector feedback and (2) corner cube retroreflector. The fundamental advantages and the limits of the lamellar grating interferometers are also discussed.","PeriodicalId":366216,"journal":{"name":"2009 International Symposium on Optomechatronic Technologies","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-11-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133538464","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Local versus global evaluation of a cooperative fusion system for 3D image interpretation 三维图像判读协同融合系统的局部与全局评价
Pub Date : 2009-11-10 DOI: 10.1109/ISOT.2009.5326129
Abdellah Lamallem, L. Valet, D. Coquin
Information fusion approaches are more and more used in complex applications in which there is a real need to take into account several kinds of information simultaneously. Fusion systems become complex because they involve all the information treatment chain steps (from the extraction to the decision). A global evaluation of the fused result does not allow the end-users to adjust the numerous parameters and to efficiency interact with the system. This paper proposes a local approach to evaluate the mission completeness of each subpart of the fusion systems. For this, the main mission of each subpart needs to be well formulated and then, a mission achievement measurement will allow to quantify the performance of the subpart according to its objective and independently to the method used inside the subparts. The proposed measurement is based on an histograms comparison and the approach is then illustrated on a real cooperative fusion system devoted to 3D tomographic image interpretation.
信息融合方法越来越多地应用于需要同时考虑多种信息的复杂应用中。融合系统变得复杂,因为它们涉及所有信息处理链步骤(从提取到决策)。对融合结果的全局评估不允许最终用户调整众多参数并有效地与系统交互。本文提出了一种局部评价融合系统各子部分任务完备性的方法。为此,需要很好地制定每个子部件的主要任务,然后,任务成就度量将允许根据子部件的目标和独立于子部件内部使用的方法来量化子部件的性能。所提出的测量方法基于直方图比较,然后在一个致力于三维层析图像解释的实际协同融合系统上进行了说明。
{"title":"Local versus global evaluation of a cooperative fusion system for 3D image interpretation","authors":"Abdellah Lamallem, L. Valet, D. Coquin","doi":"10.1109/ISOT.2009.5326129","DOIUrl":"https://doi.org/10.1109/ISOT.2009.5326129","url":null,"abstract":"Information fusion approaches are more and more used in complex applications in which there is a real need to take into account several kinds of information simultaneously. Fusion systems become complex because they involve all the information treatment chain steps (from the extraction to the decision). A global evaluation of the fused result does not allow the end-users to adjust the numerous parameters and to efficiency interact with the system. This paper proposes a local approach to evaluate the mission completeness of each subpart of the fusion systems. For this, the main mission of each subpart needs to be well formulated and then, a mission achievement measurement will allow to quantify the performance of the subpart according to its objective and independently to the method used inside the subparts. The proposed measurement is based on an histograms comparison and the approach is then illustrated on a real cooperative fusion system devoted to 3D tomographic image interpretation.","PeriodicalId":366216,"journal":{"name":"2009 International Symposium on Optomechatronic Technologies","volume":"33 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-11-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117032438","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
期刊
2009 International Symposium on Optomechatronic Technologies
全部 Acc. Chem. Res. ACS Applied Bio Materials ACS Appl. Electron. Mater. ACS Appl. Energy Mater. ACS Appl. Mater. Interfaces ACS Appl. Nano Mater. ACS Appl. Polym. Mater. ACS BIOMATER-SCI ENG ACS Catal. ACS Cent. Sci. ACS Chem. Biol. ACS Chemical Health & Safety ACS Chem. Neurosci. ACS Comb. Sci. ACS Earth Space Chem. ACS Energy Lett. ACS Infect. Dis. ACS Macro Lett. ACS Mater. Lett. ACS Med. Chem. Lett. ACS Nano ACS Omega ACS Photonics ACS Sens. ACS Sustainable Chem. Eng. ACS Synth. Biol. Anal. Chem. BIOCHEMISTRY-US Bioconjugate Chem. BIOMACROMOLECULES Chem. Res. Toxicol. Chem. Rev. Chem. Mater. CRYST GROWTH DES ENERG FUEL Environ. Sci. Technol. Environ. Sci. Technol. Lett. Eur. J. Inorg. Chem. IND ENG CHEM RES Inorg. Chem. J. Agric. Food. Chem. J. Chem. Eng. Data J. Chem. Educ. J. Chem. Inf. Model. J. Chem. Theory Comput. J. Med. Chem. J. Nat. Prod. J PROTEOME RES J. Am. Chem. Soc. LANGMUIR MACROMOLECULES Mol. Pharmaceutics Nano Lett. Org. Lett. ORG PROCESS RES DEV ORGANOMETALLICS J. Org. Chem. J. Phys. Chem. J. Phys. Chem. A J. Phys. Chem. B J. Phys. Chem. C J. Phys. Chem. Lett. Analyst Anal. Methods Biomater. Sci. Catal. Sci. Technol. Chem. Commun. Chem. Soc. Rev. CHEM EDUC RES PRACT CRYSTENGCOMM Dalton Trans. Energy Environ. Sci. ENVIRON SCI-NANO ENVIRON SCI-PROC IMP ENVIRON SCI-WAT RES Faraday Discuss. Food Funct. Green Chem. Inorg. Chem. Front. Integr. Biol. J. Anal. At. Spectrom. J. Mater. Chem. A J. Mater. Chem. B J. Mater. Chem. C Lab Chip Mater. Chem. Front. Mater. Horiz. MEDCHEMCOMM Metallomics Mol. Biosyst. Mol. Syst. Des. Eng. Nanoscale Nanoscale Horiz. Nat. Prod. Rep. New J. Chem. Org. Biomol. Chem. Org. Chem. Front. PHOTOCH PHOTOBIO SCI PCCP Polym. Chem.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1