{"title":"Design and modeling of a large deflection microcantilever using rectangular SCR","authors":"S. A. Ali, H. B. Bhuvaneswari, B. R. Kumar","doi":"10.1063/5.0027942","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":445590,"journal":{"name":"THIRD INTERNATIONAL CONFERENCE ON INVENTIVE MATERIAL SCIENCE APPLICATIONS: ICIMA 2020","volume":"27 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2020-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"THIRD INTERNATIONAL CONFERENCE ON INVENTIVE MATERIAL SCIENCE APPLICATIONS: ICIMA 2020","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1063/5.0027942","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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