B. M, Subhradeep Pal, Kannan Ramaswamy, P. Pattnaik
{"title":"Waveguide Bragg Grating Optical MEMS Accelerometer based on Circular Diaphragm","authors":"B. M, Subhradeep Pal, Kannan Ramaswamy, P. Pattnaik","doi":"10.1109/WRAP54064.2022.9758231","DOIUrl":null,"url":null,"abstract":"Design and analysis of optical MEMS accelerometer based on waveguide Bragg grating integrated with circular diaphragm with embossed centre mass for vibration measurement are presented in this paper. A waveguide Bragg grating is positioned on the top surface of the embossed proof-mass to maximize strain sensitivity. A reference grating on the substrate is used to compensate for the temperature dependence of Bragg peak. Due to excellent linear response, sensitivity of −180 pm/kG and a natural frequency of 4.8 kHz, the proposed accelerometer is suitable for vibration measurement.","PeriodicalId":363857,"journal":{"name":"2022 Workshop on Recent Advances in Photonics (WRAP)","volume":"144 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-03-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 Workshop on Recent Advances in Photonics (WRAP)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/WRAP54064.2022.9758231","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Design and analysis of optical MEMS accelerometer based on waveguide Bragg grating integrated with circular diaphragm with embossed centre mass for vibration measurement are presented in this paper. A waveguide Bragg grating is positioned on the top surface of the embossed proof-mass to maximize strain sensitivity. A reference grating on the substrate is used to compensate for the temperature dependence of Bragg peak. Due to excellent linear response, sensitivity of −180 pm/kG and a natural frequency of 4.8 kHz, the proposed accelerometer is suitable for vibration measurement.
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