Parallel-Coupled Square-Resonator Micromechanical Filter Arrays

Abstract

Large, parallel-coupled arrays of micromechanical square resonators have been demonstrated, greatly reducing the equivalent impedance of the aggregate resonator by up to a factor of 30 in an array of 30 strongly-coupled devices while retaining quality factors approaching 10,000. In addition, multiple strong-coupled arrays have been weakly coupled via mechanical linkage in order to form a 10.7MHz IF filter, such as would be required in a heterodyning FM radio system, with greatly reduced matching impedance requirements