Anomaly detection and analysis by a gradient boosting trees and neural network ensemble model

Takayuki Nishimura, Tanaka Hisanori
{"title":"Anomaly detection and analysis by a gradient boosting trees and neural network ensemble model","authors":"Takayuki Nishimura, Tanaka Hisanori","doi":"10.1109/ISSM51728.2020.9377494","DOIUrl":null,"url":null,"abstract":"In this paper, we describe a method for predicting product characteristics, its evaluation results, and application examples. Process equipment data is selected as an explanatory variable. By using an ensemble of gradient boosting trees and neural networks, we were able to construct a prediction model with higher accuracy than the conventional model. In addition, anomaly detection and analysis based on this prediction model are discussed.","PeriodicalId":270309,"journal":{"name":"2020 International Symposium on Semiconductor Manufacturing (ISSM)","volume":"29 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2020-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 International Symposium on Semiconductor Manufacturing (ISSM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISSM51728.2020.9377494","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract

In this paper, we describe a method for predicting product characteristics, its evaluation results, and application examples. Process equipment data is selected as an explanatory variable. By using an ensemble of gradient boosting trees and neural networks, we were able to construct a prediction model with higher accuracy than the conventional model. In addition, anomaly detection and analysis based on this prediction model are discussed.
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基于梯度增强树和神经网络集成模型的异常检测与分析
本文介绍了一种预测产品特性的方法、评价结果和应用实例。选择工艺设备数据作为解释变量。通过使用梯度增强树和神经网络的集合,我们能够构建比传统模型具有更高精度的预测模型。此外,还讨论了基于该预测模型的异常检测与分析。
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