{"title":"Anomaly detection and analysis by a gradient boosting trees and neural network ensemble model","authors":"Takayuki Nishimura, Tanaka Hisanori","doi":"10.1109/ISSM51728.2020.9377494","DOIUrl":null,"url":null,"abstract":"In this paper, we describe a method for predicting product characteristics, its evaluation results, and application examples. Process equipment data is selected as an explanatory variable. By using an ensemble of gradient boosting trees and neural networks, we were able to construct a prediction model with higher accuracy than the conventional model. In addition, anomaly detection and analysis based on this prediction model are discussed.","PeriodicalId":270309,"journal":{"name":"2020 International Symposium on Semiconductor Manufacturing (ISSM)","volume":"29 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2020-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 International Symposium on Semiconductor Manufacturing (ISSM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISSM51728.2020.9377494","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
In this paper, we describe a method for predicting product characteristics, its evaluation results, and application examples. Process equipment data is selected as an explanatory variable. By using an ensemble of gradient boosting trees and neural networks, we were able to construct a prediction model with higher accuracy than the conventional model. In addition, anomaly detection and analysis based on this prediction model are discussed.