In0.53 Ga 0.47 As Triangular GAA MOSFETs

M. Khaouani, Z. Kourdi
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Abstract

Triangular GAA MOSFETs (gate-all-around metal oxide semiconductor) with III-V material in channel has been simulated by Atlas Tcad-Silvaco software, we has used for obtain DC, AC characteristics analysis. Those devices provide superior electrostatic control of channel, A different performance (gm, DIBL, ION/IOFF) with 14 nm channel length viewing the impunity to short channel effects with 3D advanced structure that we got gm=178 ms/mm at VDS =0.25V, a reasonable ratio ION/IOFF of 5.1 * 104, sub-threshold sweep (SS) equal to 135 mV/dec, DIBL =40 mV/V drain induced barrier lowering (DIBL) and finally a cut-off frequency of fC=800 GHz, the III-V GAA MOSFETs structures has provided a achievable path around optimal scaling of this devices.
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In0.53 Ga 0.47 As三角形GAA mosfet
利用Atlas Tcad-Silvaco软件对沟道中III-V型材料的三角形GAA mosfet(栅极全金属氧化物半导体)进行了仿真,并对其进行了直流、交流特性分析。这些器件提供了优越的通道静电控制,在14 nm通道长度下具有不同的性能(gm, DIBL, ION/IOFF),观察3D先进结构对短通道效应的影响,我们得到了VDS =0.25V时gm=178 ms/mm,合理的ION/IOFF比为5.1 * 104,亚阈值扫描(SS)等于135 mV/dec, DIBL =40 mV/V漏极诱导阻挡降低(DIBL),最后截止频率为fC=800 GHz。III-V GAA mosfet结构为该器件的最佳缩放提供了可实现的路径。
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