Qiang Shi, Shengbo Sang, Wendong Zhang, Pengwei Li, Jie Hu, Gang Li
{"title":"Temperature sensor based on silicon microring","authors":"Qiang Shi, Shengbo Sang, Wendong Zhang, Pengwei Li, Jie Hu, Gang Li","doi":"10.1109/NANO.2013.6720930","DOIUrl":null,"url":null,"abstract":"A comprehensive investigation of silicon microring sensor, which is used for temperature detection, is reported in this paper, and the theory was introduced in detail. Numerical analysis shows that the silicon microring has a high sensitivity and a very good linearity between real-time temperature and effective index. By optimizing the parameters, the microring sensor can obtain a higher sensitivity. The resonance peak will shift obviously when the temperature changes. A temperature change of 0.1°C can be detected. It also proves that the geometry structure of waveguide will not influence the sensor sensitivity. This sensor will have a great potential usage for real time sensing.","PeriodicalId":189707,"journal":{"name":"2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013)","volume":"3 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NANO.2013.6720930","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
A comprehensive investigation of silicon microring sensor, which is used for temperature detection, is reported in this paper, and the theory was introduced in detail. Numerical analysis shows that the silicon microring has a high sensitivity and a very good linearity between real-time temperature and effective index. By optimizing the parameters, the microring sensor can obtain a higher sensitivity. The resonance peak will shift obviously when the temperature changes. A temperature change of 0.1°C can be detected. It also proves that the geometry structure of waveguide will not influence the sensor sensitivity. This sensor will have a great potential usage for real time sensing.
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