Copper Wire Bond Optimization for Power Devices

T. Pinili, R. Manolo, A. Denoyo, B. Yabut, D. Moore, B. Cowell, J. Jenson, K. Truong, J. Gambino, R. Watkins, W. Qin, G. Brizar, J. De Clerq
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引用次数: 2

Abstract

We report on bond pad damage for a smart power device using 50.8 µm (2 mil) diameter Pd-coated Cu wire. We show that the damage can be relatively subtle; the wire bonds on damaged structures have high pull and shear strength, but cracks in the underlying regions lead to metal extrusions that cause electrical shorts.
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电力器件的铜线键合优化
我们报告了使用50.8µm (2 mil)直径的pd涂层铜线的智能电源器件的键合垫损坏。我们表明,这种损害可能相对微妙;损坏结构上的导线键具有较高的拉力和剪切强度,但底层区域的裂纹会导致金属挤压,从而导致电气短路。
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