Fabrication of gold multi-electrode array with bi-layer lift-off resist technique and surface modification with gold nanoparticles by electrochemical deposition

Abstract

Electrochemical deposition of gold nanoparticles (Au NPs) on the gold multi-electrode array (MEA) fabricated with bi-layer lift-off resist sputter-deposition technique was performed. Electrochemical deposition was performed by potentiostatic and cyclic voltammetry method. The surface of Au NP-modified electrode showed various morphologies with applied voltage and the concentration of HAuCl4 solution. The Au NP-modified electrode was characterized by electrochemical impedance spectroscopy and cyclic voltammogram. The performance of Au NP-modified MEA was also tested by neuronal signal recording. The Au NP-modified MEA exhibited lower baseline noises and can record neuronal spike signals longer than the bare Au MEA.