WO3 thin films by spin coating technique and their wettability

Z. Khalifa, M. Shaban, M. Zayed
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Abstract

Preparation of tungsten trioxide, WO 3, thin films on c-Si substrates using sol-gel method from a precursor based on non-alkoxide materials has been done in this study. Differential scanning calorimetry, DSC, thermogravimetry, TGA, and differential thermal analysis, DTA, have been used to monitor structural changes during heating. Thermal analysis of the xerogel gives a clear idea about water evolving and phase change. X-ray diffraction, XRD, studies revealed that the film dried at 120 ˚C for 1h is non-crystalline. After heating at 700˚C for 2h, a monoclinic phase of WO 3 with preferred orientation along (200) direction appeared. Chemical bonding has been explored by Fourier transform infrared spectroscopy, FTIR. Surface roughness has been found to increase with the increase of annealing temperature as revealed from AFM measurements. At temperatures equal and above 700 ˚C, contact angle decreased due to surface roughness increase. Correlation between the characteristic properties and the contact angle measurements has been discussed.
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旋涂技术制备WO3薄膜及其润湿性
采用溶胶-凝胶法制备了基于非醇盐材料的前驱体在c-Si基底上的三氧化钨薄膜。差示扫描量热法(DSC)、热重法(热重法)、热重分析(TGA)和差示热分析(DTA)已被用于监测加热过程中的结构变化。对干凝胶的热分析使我们对水的演化和相变有了清晰的认识。x射线衍射(XRD)研究表明,该膜在120℃下干燥1h为非晶膜。在700℃下加热2h后,wo3出现沿(200)方向择优取向的单斜相。用傅里叶变换红外光谱(FTIR)探索了化学键。表面粗糙度随着退火温度的升高而增加,这是AFM测量的结果。在700℃及以上温度下,由于表面粗糙度增加,接触角减小。讨论了接触角测量与材料特性的关系。
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