K. Orihara, K. Minami, T. Nakano, K. Hatano, M. Furumiya, N. Mutoh, M. Ohbo, Y. Hokari
{"title":"New shunt wiring technologies for high performance HDTV CCD image sensors","authors":"K. Orihara, K. Minami, T. Nakano, K. Hatano, M. Furumiya, N. Mutoh, M. Ohbo, Y. Hokari","doi":"10.1109/IEDM.1992.307319","DOIUrl":null,"url":null,"abstract":"New shunt wiring technologies for HDTV FIT-CCD image sensors have been developed. They include tungsten direct shunt wiring structure. As well as a new layout for tungsten shunt lines and aluminum bus lines. A 1-inch format 2M pixel FIT-CCD image sensor was fabricated using these technologies. A low smear level, less than -110 dB, was achieved at 1 MHz frame shift frequency. Furthermore, a 1.2*10/sup 5/ electron charge handling capability was obtained up to 1.4 MHz frame shift frequency.<<ETX>>","PeriodicalId":287098,"journal":{"name":"1992 International Technical Digest on Electron Devices Meeting","volume":"4 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"1992 International Technical Digest on Electron Devices Meeting","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IEDM.1992.307319","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
New shunt wiring technologies for HDTV FIT-CCD image sensors have been developed. They include tungsten direct shunt wiring structure. As well as a new layout for tungsten shunt lines and aluminum bus lines. A 1-inch format 2M pixel FIT-CCD image sensor was fabricated using these technologies. A low smear level, less than -110 dB, was achieved at 1 MHz frame shift frequency. Furthermore, a 1.2*10/sup 5/ electron charge handling capability was obtained up to 1.4 MHz frame shift frequency.<>
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
