Application of photoelastic microscopy for researches in MEMS technology and photonics

Abstract

This paper is devoted to the principles of modulation-polarization microscopy applied to surface and volume structures of solid-state materials of electronics, photonics and bioelectronics. A new setup of modulation-polarization microscope is introduced; its main advantages are speed, interference immunity, high detectivity, cheapness and simplicity of implementation. Presented method and preliminary results confirm the usability of the new photoelastic microscope for research and development of MEMS devices; micro-nano control and processing of crystal, polymers and metals surfaces and transparent volumes.