Statistical Variations Are Inevitable - Can We Cope With Them?

K. Nowka
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Abstract

The ever-decreasing size of wires and transistors on VLSI chips has driven the revolution in electronics over the past several decades. The features in advanced chips are now so small that variations in numbers of photons and numbers of atoms matter. Lithography of subwavelength device dimensions and statistical variations in the numbers of dopant atoms that elicit transistor behavior result in significant variation in the electrical properties of tiny transistors. Such variations are an inevitable consequence of miniaturization revealing the quantized nature of light and matter.
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统计差异是不可避免的——我们能应对吗?
在过去的几十年里,VLSI芯片上的电线和晶体管的尺寸不断缩小,推动了电子技术的革命。现在先进芯片的功能非常小,光子数量和原子数量的变化都很重要。亚波长器件尺寸的光刻和引起晶体管行为的掺杂原子数量的统计变化导致微小晶体管的电性能发生显著变化。这种变化是揭示光和物质的量子化本质的微型化的必然结果。
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