{"title":"An electrostatic parylene microvalve for lab-on-a-chip applications","authors":"E. Yıldırım, A. Koyuncuoğlu, H. Külah","doi":"10.1109/BIYOMUT.2010.5479784","DOIUrl":null,"url":null,"abstract":"This paper presents a novel electrostatically actuated microvalve for lab-on-a-chip applications, fabricated using surface micromachining techniques. Lab-on-a-chip applications generally involve in-plane microflows. Microvalve mentioned here operates by moving a diaphragm, which is in-plane with the flow, perpendicular to the stream with the help of electrostatic forces. Operating principles and the operation of the valve are presented in the paper.","PeriodicalId":180275,"journal":{"name":"2010 15th National Biomedical Engineering Meeting","volume":"98 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-04-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2010 15th National Biomedical Engineering Meeting","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/BIYOMUT.2010.5479784","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
This paper presents a novel electrostatically actuated microvalve for lab-on-a-chip applications, fabricated using surface micromachining techniques. Lab-on-a-chip applications generally involve in-plane microflows. Microvalve mentioned here operates by moving a diaphragm, which is in-plane with the flow, perpendicular to the stream with the help of electrostatic forces. Operating principles and the operation of the valve are presented in the paper.
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