M. Kadota, Y. Yunoki, T. Shimatsu, Miyuki Uomot, Shuji Tanaka
{"title":"Near-Zero TCF of HAL SAW Resonator with LiTaO3-on-Quartz Structure","authors":"M. Kadota, Y. Yunoki, T. Shimatsu, Miyuki Uomot, Shuji Tanaka","doi":"10.1109/FCS.2018.8597496","DOIUrl":null,"url":null,"abstract":"This paper reports the recent progress of a new type of hetero acoustic layer (HAL) surface acoustic wave (SAW) resonators using a $0.44 \\text{to} 1.12 \\mu \\mathrm{m}$ thick rotated-Y LiTa03 (LT) plate and a near ST-cut quartz substrate. This material combination was selected, because quartz has a higher velocity of leaky SAW than LT and a positive temperature coefficient of frequency (TCF). An impedance ratio of 82 dB and a Bode Q of 3, 000 were obtained, and TCFs at series and parallel resonance were measured to be +2 and −10 ppm/PC, respectively. Compared with the characteristics of a standard 42°YX LT SAW resonator fabricated in the same facility, the impedance ratio is higher by 31 dB, the bode Q is 6.3 times higher, and the TCFs at series and parallel resonance are as small as 1/25 and 1/6, respectively.","PeriodicalId":180164,"journal":{"name":"2018 IEEE International Frequency Control Symposium (IFCS)","volume":"128 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"14","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 IEEE International Frequency Control Symposium (IFCS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/FCS.2018.8597496","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 14
Abstract
This paper reports the recent progress of a new type of hetero acoustic layer (HAL) surface acoustic wave (SAW) resonators using a $0.44 \text{to} 1.12 \mu \mathrm{m}$ thick rotated-Y LiTa03 (LT) plate and a near ST-cut quartz substrate. This material combination was selected, because quartz has a higher velocity of leaky SAW than LT and a positive temperature coefficient of frequency (TCF). An impedance ratio of 82 dB and a Bode Q of 3, 000 were obtained, and TCFs at series and parallel resonance were measured to be +2 and −10 ppm/PC, respectively. Compared with the characteristics of a standard 42°YX LT SAW resonator fabricated in the same facility, the impedance ratio is higher by 31 dB, the bode Q is 6.3 times higher, and the TCFs at series and parallel resonance are as small as 1/25 and 1/6, respectively.
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