Pub Date : 2018-12-31DOI: 10.1109/FCS.2018.8597519
X. Pang, Y. Yong, R. Kubena, W. W. Wal, R. Joyce, D. Kirby
AT-cut shear-mode UHF quartz MEMS resonators have been found to be highly sensitive to magnetic signals when magnetostrictive films are deposited on the top electrode surface. The induced voltages across the resonator plates due to applied external magnetic signals have been computed within a COMSOL 3D finite-element model. Optimal orientations of the internal magnetization and polarization of the external H fields relative to the quartz crystalline axes were determined. Self-consistent coupled strains induced in the magnetostrictive film from both the piezoelectric plate deformations and the external magnetic field were included. The theory of magnetostriction and the characterization of magnetostrictive curve of thin-film Ni (nickel) deposited on quartz resonator with the Ni film magnetized either prior or after deposition were discussed. The magnetostriction curve is an important determinant of the induced voltage across the quartz plate in external H fields. Both the responses of the AT-cut resonator without Ni coating and with Ni coating were simulated in this paper. The experimentally observed response of a 355-MHz AT-cut resonator to the electric component of external RF wave was reported. The electric response of magnetostrictive Ni coated AT-cut resonator dominated the magnetic response. The sensitivity of electric response was calculated to be 320 mV/Oe.
{"title":"Magnetostrictive-Based Quartz MEMS RF Sensors","authors":"X. Pang, Y. Yong, R. Kubena, W. W. Wal, R. Joyce, D. Kirby","doi":"10.1109/FCS.2018.8597519","DOIUrl":"https://doi.org/10.1109/FCS.2018.8597519","url":null,"abstract":"AT-cut shear-mode UHF quartz MEMS resonators have been found to be highly sensitive to magnetic signals when magnetostrictive films are deposited on the top electrode surface. The induced voltages across the resonator plates due to applied external magnetic signals have been computed within a COMSOL 3D finite-element model. Optimal orientations of the internal magnetization and polarization of the external H fields relative to the quartz crystalline axes were determined. Self-consistent coupled strains induced in the magnetostrictive film from both the piezoelectric plate deformations and the external magnetic field were included. The theory of magnetostriction and the characterization of magnetostrictive curve of thin-film Ni (nickel) deposited on quartz resonator with the Ni film magnetized either prior or after deposition were discussed. The magnetostriction curve is an important determinant of the induced voltage across the quartz plate in external H fields. Both the responses of the AT-cut resonator without Ni coating and with Ni coating were simulated in this paper. The experimentally observed response of a 355-MHz AT-cut resonator to the electric component of external RF wave was reported. The electric response of magnetostrictive Ni coated AT-cut resonator dominated the magnetic response. The sensitivity of electric response was calculated to be 320 mV/Oe.","PeriodicalId":180164,"journal":{"name":"2018 IEEE International Frequency Control Symposium (IFCS)","volume":"165 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-12-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131318742","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-08-21DOI: 10.1109/FCS.2018.8597556
J. Savory, J. Sherman, S. Romisch
The National Institute of Standards and Technology (NIST) produces a real-time realization of UTC(NIST) which is used to contribute to Coordinated Universal Time (UTC) and as a source for accurate time in the USA. The atomic clocks contributing to the time scale ensemble, the time transfer systems used to contribute to UTC and the distribution system used to disseminate UTC(NIST) to remote users are located in different parts of the NIST campus, far from each other and from the UTC(NIST) reference point. Since the physical inputs to these systems are not collocated within the campus, an accurate and stable infrastructure for time signal distribution is required. Currently, the local delays need to be known with an uncertainty of a few hundreds of picoseconds to avoid compromising the ultimate accuracy of the time transfer link's calibrations. Previously, coaxial cables or a commercial fiber-based frequency transfer system implemented by amplitude-modulation of a laser source were used to distribute signals between on-site locations, and clock trip calibrations were performed to measure the delays experienced by these signals [1]. The capability of WR-based time transfer systems to provide an on-time, accurate remote copy of its input pulse-per-second (PPS) signal made it a very appealing alternative to our previously implemented distribution system, which required time consuming re-calibration following instances of temporary signal interruptions. In this paper, we evaluate the use of WR-based time and frequency transfer within the NIST campus and verify its calibration procedure using a clock trip protocol [1].
{"title":"White Rabbit-Based Time Distribution at NIST","authors":"J. Savory, J. Sherman, S. Romisch","doi":"10.1109/FCS.2018.8597556","DOIUrl":"https://doi.org/10.1109/FCS.2018.8597556","url":null,"abstract":"The National Institute of Standards and Technology (NIST) produces a real-time realization of UTC(NIST) which is used to contribute to Coordinated Universal Time (UTC) and as a source for accurate time in the USA. The atomic clocks contributing to the time scale ensemble, the time transfer systems used to contribute to UTC and the distribution system used to disseminate UTC(NIST) to remote users are located in different parts of the NIST campus, far from each other and from the UTC(NIST) reference point. Since the physical inputs to these systems are not collocated within the campus, an accurate and stable infrastructure for time signal distribution is required. Currently, the local delays need to be known with an uncertainty of a few hundreds of picoseconds to avoid compromising the ultimate accuracy of the time transfer link's calibrations. Previously, coaxial cables or a commercial fiber-based frequency transfer system implemented by amplitude-modulation of a laser source were used to distribute signals between on-site locations, and clock trip calibrations were performed to measure the delays experienced by these signals [1]. The capability of WR-based time transfer systems to provide an on-time, accurate remote copy of its input pulse-per-second (PPS) signal made it a very appealing alternative to our previously implemented distribution system, which required time consuming re-calibration following instances of temporary signal interruptions. In this paper, we evaluate the use of WR-based time and frequency transfer within the NIST campus and verify its calibration procedure using a clock trip protocol [1].","PeriodicalId":180164,"journal":{"name":"2018 IEEE International Frequency Control Symposium (IFCS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125722269","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
I. Khader, H. Bergeron, L. Sinclair, W. Swann, N. Newbury, J. Deschênes
Free space optical communication channels can transmit high-speed data between sites over the air. We show here that a FSO digital optical communication channel can be re-purposed and used directly for two-way time transfer. We demonstrate real-time synchronization between two sites over a turbulent air path of 4 km using binary phase modulated CW laser light. Under synchronization, the two sites have a sub-3-ps time deviation below the synchronization bandwidth and a fractional frequency deviation below 10–15 at one hour averaging time. Over an 8-hour period the peak-to-peak wander is 16 ps. Work of the US government not subject to copyright.
{"title":"Time Synchronization Over a Free-Space Optical Communication Channel","authors":"I. Khader, H. Bergeron, L. Sinclair, W. Swann, N. Newbury, J. Deschênes","doi":"10.1364/OPTICA.5.001542","DOIUrl":"https://doi.org/10.1364/OPTICA.5.001542","url":null,"abstract":"Free space optical communication channels can transmit high-speed data between sites over the air. We show here that a FSO digital optical communication channel can be re-purposed and used directly for two-way time transfer. We demonstrate real-time synchronization between two sites over a turbulent air path of 4 km using binary phase modulated CW laser light. Under synchronization, the two sites have a sub-3-ps time deviation below the synchronization bandwidth and a fractional frequency deviation below 10–15 at one hour averaging time. Over an 8-hour period the peak-to-peak wander is 16 ps. Work of the US government not subject to copyright.","PeriodicalId":180164,"journal":{"name":"2018 IEEE International Frequency Control Symposium (IFCS)","volume":"44 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-08-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131261555","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-05-21DOI: 10.1109/FCS.2018.8597451
Wang Shan-he, Xiang Yu, Hua Yu, Ju Jun, Xue Weicheng
In this paper, the principle and method of Digital Satellite TV Differential Timing Method are illustrated, and the error sources that influence timing accuracy are further analyzed, including clock difference fitting. The theoretical derivation and experiments show that timing accuracy of digital satellite TV differential timing method is higher than 10ns.
{"title":"Research of Digital Satellite TV Differential Timing Method","authors":"Wang Shan-he, Xiang Yu, Hua Yu, Ju Jun, Xue Weicheng","doi":"10.1109/FCS.2018.8597451","DOIUrl":"https://doi.org/10.1109/FCS.2018.8597451","url":null,"abstract":"In this paper, the principle and method of Digital Satellite TV Differential Timing Method are illustrated, and the error sources that influence timing accuracy are further analyzed, including clock difference fitting. The theoretical derivation and experiments show that timing accuracy of digital satellite TV differential timing method is higher than 10ns.","PeriodicalId":180164,"journal":{"name":"2018 IEEE International Frequency Control Symposium (IFCS)","volume":"54 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122262194","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-05-21DOI: 10.1109/FCS.2018.8597517
J. Stegner, S. Gropp, D. Podoskin, U. Stehr, M. Hoffmann, M. Hein
Mirco-electromechanical systems (MEMS) have already revolutionised the world of radio-frequency (RF) electronic circuits. Especially their small size and compatibility with semiconductor processes make MEMS devices advantageous for the use in integrated timing devices such as RF-MEMS oscillators. In addition to the wide-spread numerical simulations, analytical design aids remain to be of utmost relevance when it comes to optimising the performance of RF-MEMS circuits. In this paper, we present an extended analytical treatment of MEMS resonators that has not been considered before. Based on the wave equation, the mechanical stress is calculated for a contour-mode resonator, and the resulting trans-admittance and an equivalent-circuit model are derived in closed form. A comparison of the results with the state-of-the-art and measurement results underline the correctness and accuracy of this extended formulation.
{"title":"An Analytical Formulation of the Radio-Frequency Response of Piezoelectric Contour-Mode MEMS Resonators Verified by Measurements","authors":"J. Stegner, S. Gropp, D. Podoskin, U. Stehr, M. Hoffmann, M. Hein","doi":"10.1109/FCS.2018.8597517","DOIUrl":"https://doi.org/10.1109/FCS.2018.8597517","url":null,"abstract":"Mirco-electromechanical systems (MEMS) have already revolutionised the world of radio-frequency (RF) electronic circuits. Especially their small size and compatibility with semiconductor processes make MEMS devices advantageous for the use in integrated timing devices such as RF-MEMS oscillators. In addition to the wide-spread numerical simulations, analytical design aids remain to be of utmost relevance when it comes to optimising the performance of RF-MEMS circuits. In this paper, we present an extended analytical treatment of MEMS resonators that has not been considered before. Based on the wave equation, the mechanical stress is calculated for a contour-mode resonator, and the resulting trans-admittance and an equivalent-circuit model are derived in closed form. A comparison of the results with the state-of-the-art and measurement results underline the correctness and accuracy of this extended formulation.","PeriodicalId":180164,"journal":{"name":"2018 IEEE International Frequency Control Symposium (IFCS)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128524338","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-05-21DOI: 10.1109/FCS.2018.8597568
C. Cassella, M. Rinaldi
This work discusses, for the first time through the Lamb-Wave theory, the origin of the recently reported high electromechanical coupling coefficient values $(k_{t}^{2})$ in two-dimensional modes of vibration excited in Aluminum Nitride (AIN) plates. In particular, we investigate the operation of the recently demonstrated Two-Dimensional Mode Resonators (2DMRs) and Cross-Sectional Lamé Mode Resonators (CLMRs). Precisely, we show how 2DMRs consist of dispersive $mathbf{s}_{1}$-mode resonators. In contrast, we demonstrate that CLMRs consist of multi-modal resonators relying on both the $mathbf{S}_{0^{-}}$ and $mathbf{S}_{1}$-modes of vibration by operating at higher resonance frequencies, for the $mathbf{S}_{0}$-mode, than the dilatational frequency relative to the $mathbf{S}_{1}$-mode.
{"title":"On the Origin of High Couplings Two-Dimensional Modes of Vibration in Aluminum Nitride Plates","authors":"C. Cassella, M. Rinaldi","doi":"10.1109/FCS.2018.8597568","DOIUrl":"https://doi.org/10.1109/FCS.2018.8597568","url":null,"abstract":"This work discusses, for the first time through the Lamb-Wave theory, the origin of the recently reported high electromechanical coupling coefficient values $(k_{t}^{2})$ in two-dimensional modes of vibration excited in Aluminum Nitride (AIN) plates. In particular, we investigate the operation of the recently demonstrated Two-Dimensional Mode Resonators (2DMRs) and Cross-Sectional Lamé Mode Resonators (CLMRs). Precisely, we show how 2DMRs consist of dispersive $mathbf{s}_{1}$-mode resonators. In contrast, we demonstrate that CLMRs consist of multi-modal resonators relying on both the $mathbf{S}_{0^{-}}$ and $mathbf{S}_{1}$-modes of vibration by operating at higher resonance frequencies, for the $mathbf{S}_{0}$-mode, than the dilatational frequency relative to the $mathbf{S}_{1}$-mode.","PeriodicalId":180164,"journal":{"name":"2018 IEEE International Frequency Control Symposium (IFCS)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126356385","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-05-21DOI: 10.1109/FCS.2018.8597489
Pen-Li Yu, N. Opondo, Sen Dai, Boyang Jiang, D. Morisette, S. Bhave
We report the first wafer-scale fabrication of semi-insulating, single-crystalline 4H-SiC membrane resonators by timed deep reactive ion etch (DRIE). Trenches were etched $184 mumathrm{m}$ deep with 84.7° sidewall angle to form $16 mumathrm{m}$ thick suspended membranes. Sidewall angle, DRIE footing, and surface roughness are characterized. Measured resonance frequencies match with COMSOL simulation within 4%. The modes have quality factors of 500 to 1000 at ambient condition.
我们报道了用定时深度反应离子蚀刻(DRIE)技术首次在晶圆尺度上制备半绝缘、单晶4H-SiC膜谐振器。蚀刻深度$184 mu mathm {m}$，侧壁角84.7°，形成$16 mu mathm {m}$厚的悬浮膜。侧壁角，驱动基础和表面粗糙度的特征。测量的共振频率与COMSOL模拟的匹配在4%以内。在环境条件下，模态的质量因子为500 ~ 1000。
{"title":"Single Crystalline 4H-SiC Membrane Resonators","authors":"Pen-Li Yu, N. Opondo, Sen Dai, Boyang Jiang, D. Morisette, S. Bhave","doi":"10.1109/FCS.2018.8597489","DOIUrl":"https://doi.org/10.1109/FCS.2018.8597489","url":null,"abstract":"We report the first wafer-scale fabrication of semi-insulating, single-crystalline 4H-SiC membrane resonators by timed deep reactive ion etch (DRIE). Trenches were etched $184 mumathrm{m}$ deep with 84.7° sidewall angle to form $16 mumathrm{m}$ thick suspended membranes. Sidewall angle, DRIE footing, and surface roughness are characterized. Measured resonance frequencies match with COMSOL simulation within 4%. The modes have quality factors of 500 to 1000 at ambient condition.","PeriodicalId":180164,"journal":{"name":"2018 IEEE International Frequency Control Symposium (IFCS)","volume":"65 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126491729","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-05-21DOI: 10.1109/FCS.2018.8597518
Sidhant Tiwari, Max Ho, Amanda Marotto, R. Candler
Wireless multiferroics is an emerging field taking advantage of energy efficient multiferroic coupling to design and develop ultra-conformal, electrically-small antennas. To date, all work on MEMS scale multiferroic devices utilize linear multiferroic coupling. In this work, we present the first demonstration of frequency doubling through nonlinear multiferroics in MEMS resonators. Multiferroic composite cantilevers are fabricated and tested, and it is shown that these resonators can be wirelessly driven to mechanical resonance with magnetic fields at half of the resonant frequency by utilizing perpendicular magnetic poling. This is a potential method for low noise measurement of wireless signals, a problem that plagues all electrically-small wireless devices, which would revolutionize the emerging field of wireless multiferroic devices.
{"title":"Frequency Doubling in Wirelessly Actuated Multiferroic MEMS Cantilevers","authors":"Sidhant Tiwari, Max Ho, Amanda Marotto, R. Candler","doi":"10.1109/FCS.2018.8597518","DOIUrl":"https://doi.org/10.1109/FCS.2018.8597518","url":null,"abstract":"Wireless multiferroics is an emerging field taking advantage of energy efficient multiferroic coupling to design and develop ultra-conformal, electrically-small antennas. To date, all work on MEMS scale multiferroic devices utilize linear multiferroic coupling. In this work, we present the first demonstration of frequency doubling through nonlinear multiferroics in MEMS resonators. Multiferroic composite cantilevers are fabricated and tested, and it is shown that these resonators can be wirelessly driven to mechanical resonance with magnetic fields at half of the resonant frequency by utilizing perpendicular magnetic poling. This is a potential method for low noise measurement of wireless signals, a problem that plagues all electrically-small wireless devices, which would revolutionize the emerging field of wireless multiferroic devices.","PeriodicalId":180164,"journal":{"name":"2018 IEEE International Frequency Control Symposium (IFCS)","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133027847","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-05-21DOI: 10.1109/FCS.2018.8597494
B. Epstein, R. Olsson
Emerging Internet of Things (IoT) networks enable internetworking of remote devices with simple transceiver devices that are low cost and consume low amounts of power. However, such characteristics also limit the flexibility in how such devices and networks operate. An auxiliary channel scheme is presented that enables peer-to-peer communications between networked IoT devices, while having minimal impact on power budgets.
{"title":"IoT Networks: Frequency Control Considerations","authors":"B. Epstein, R. Olsson","doi":"10.1109/FCS.2018.8597494","DOIUrl":"https://doi.org/10.1109/FCS.2018.8597494","url":null,"abstract":"Emerging Internet of Things (IoT) networks enable internetworking of remote devices with simple transceiver devices that are low cost and consume low amounts of power. However, such characteristics also limit the flexibility in how such devices and networks operate. An auxiliary channel scheme is presented that enables peer-to-peer communications between networked IoT devices, while having minimal impact on power budgets.","PeriodicalId":180164,"journal":{"name":"2018 IEEE International Frequency Control Symposium (IFCS)","volume":"54 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123325610","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-05-21DOI: 10.1109/FCS.2018.8597572
Y. Hirai, Katsuo Nokamura, Yuichi Kimoto, T. Tsuchiya, O. Tabata
We propose a novel cesium (Cs) dispenser technique for filling microfabricated vapor cells with atomic Cs. The newly developed CS-dispenser composed of cesium aside (CSN3) crystal deposited on silicon (Si) grooves with multiple re-entrant structures (i.e. scalloped patterns) to enhance the thermal decomposition of Csn3. Scalloped patterns are fabricated by a sequence of isotropic and anisotropic deep reactive ion etching (DRIE). Here, the fabrication parameters are adjusted to obtain micro-size scalloped patterns. Sufficient amount of atomic Cs has been successfully observed in the microfabricated cells by a hotplate heating at about 315°C. This fabrication method enables effective thermal decomposition of Csn3 on Si substrate by low-temperature process, leading to reduce complexity of microfabricated vapor cells fabrication.
{"title":"Alkali Metal Dispenser Utilizing Scalloped Silicon Groove for Microfabricated Vapor Cells","authors":"Y. Hirai, Katsuo Nokamura, Yuichi Kimoto, T. Tsuchiya, O. Tabata","doi":"10.1109/FCS.2018.8597572","DOIUrl":"https://doi.org/10.1109/FCS.2018.8597572","url":null,"abstract":"We propose a novel cesium (Cs) dispenser technique for filling microfabricated vapor cells with atomic Cs. The newly developed CS-dispenser composed of cesium aside (CSN3) crystal deposited on silicon (Si) grooves with multiple re-entrant structures (i.e. scalloped patterns) to enhance the thermal decomposition of Csn3. Scalloped patterns are fabricated by a sequence of isotropic and anisotropic deep reactive ion etching (DRIE). Here, the fabrication parameters are adjusted to obtain micro-size scalloped patterns. Sufficient amount of atomic Cs has been successfully observed in the microfabricated cells by a hotplate heating at about 315°C. This fabrication method enables effective thermal decomposition of Csn3 on Si substrate by low-temperature process, leading to reduce complexity of microfabricated vapor cells fabrication.","PeriodicalId":180164,"journal":{"name":"2018 IEEE International Frequency Control Symposium (IFCS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125365228","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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