Clamp stepper piezoelectric linear motor with composite of two amplifications

Abstract

This study presents a new type of linear motor based on the micro-vibration of piezoelectric stacks. The working mechanism of the motor was analyzed. Then the clamping structure and overall structure of motor was designed. Further, the best size of the flexible structures was obtained by means of finite element analysis method on the clamping structure. The prototype was manufactured and tested. Then the speed characteristic curve of motor is analyzed. The experimental results on the prototype verify the feasibility of the scheme, by applying voltage signal of peak to peak value 100V and frequency of 150 Hz, the no-load speed is 1.23 mm/s and the thrust is 1.6 N, and it meets the basic requirement of the precision of linear feed system.