Correlation of single trapping and detrapping effects in drain and gate currents of nanoscaled nFETs and pFETs

Abstract

The correlation of discrete gate and drain current fluctuations is revealed in nanoscaled SiON pFETs and nFETs, demonstrating that discrete trapping and detrapping events in the same single states are responsible of both ID and IG random telegraph noise (RTN). The high and low gate current IG-RTN levels are independent of temperature but the switching rates thermally activated indicating that the trapping and detrapping events are consistent with nonradiative multiphonon theory.