{"title":"MEMS, microsystems and nanosystems","authors":"M. Zaghloul","doi":"10.1109/CNNA.2002.1035089","DOIUrl":null,"url":null,"abstract":"This paper reviews recent microfabrication techniques with applications to MEMS, and microsystems. Examples of MEMS devices are presented and their applications to RF-communications are discussed, along with new emerging technologies and their impact on future devices and future architectures.","PeriodicalId":387716,"journal":{"name":"Proceedings of the 2002 7th IEEE International Workshop on Cellular Neural Networks and Their Applications","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2002-07-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 2002 7th IEEE International Workshop on Cellular Neural Networks and Their Applications","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CNNA.2002.1035089","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
This paper reviews recent microfabrication techniques with applications to MEMS, and microsystems. Examples of MEMS devices are presented and their applications to RF-communications are discussed, along with new emerging technologies and their impact on future devices and future architectures.
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