A Monolithic Stable-Resonator Semiconductor Laser

S. Biellak, Y. Sun, S. Wong, A. Siegman
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Abstract

Semiconductor lasers with a variety of cavity geometries have been studied for nearly three decades. For wide stripe monolithic lasers (width > 20 μm), nearly all the resonators fabricated so far can be divided into two types: cleaved flat-mirror structures generally employing some form of gain or index guiding [1], and unstable-resonator diode lasers [2,3]. The stable-resonator geometries widely employed in ordinary gas and solid-state lasers [4] have not to date been realized in monolithic semiconductor lasers for a number of reasons. First, the technology to fabricate precisely curved end mirrors has not been widely available until recently. Second, nonlinear saturation and waveguiding effects are strong in semiconductor lasers, and hence lateral gain and index guiding can be expected to deform the modes of stable-resonator lasers at high power levels. Third, the rather weak transverse mode discrimination of stable resonators may not lead to good mode selection in diode lasers having high gain and large output coupling.
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单片稳定谐振腔半导体激光器
具有各种腔体几何形状的半导体激光器已经被研究了近三十年。对于宽条纹单片激光器(宽度> 20 μm),到目前为止,几乎所有的谐振腔都可以分为两种类型:通常采用某种形式的增益或折射率引导的劈裂平面镜结构[1]和不稳定谐振腔二极管激光器[2,3]。由于一些原因,在普通气体和固体激光器[4]中广泛使用的稳定谐振腔几何形状至今尚未在单片半导体激光器中实现。首先,制造精确弯曲的端镜的技术直到最近才得到广泛应用。其次,半导体激光器的非线性饱和和波导效应很强,因此在高功率水平下,横向增益和折射率引导可能会使稳定谐振腔激光器的模式变形。第三,在高增益、大输出耦合的二极管激光器中,稳定谐振腔的横向模分辨能力较弱,可能导致不能很好地选择模式。
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