Design, Simulation, Optimization and performance of a MEMS Based Piezoelectric Energy Harvester

Abstract

A piezoelectric harvester uses the piezoelectric effect to transform mechanical vibrations into electrical energy. The effectiveness of a piezoelectric cantilever beam to capture vibrational energy is significantly influenced by its geometry. This research proposes an unconventionally shaped MEMS-based energy harvester. The energy harvester has a rectangular cantilever construction with a triangular tip as its main structural element. The simulation findings demonstrated that the new cantilever structure can create greater stress than the triangular and rectangular structures while also improving the stress distribution. COMSOL Multiphysics is used to model the proposed construction. The energy harvesting device is modelled as a rectangular cantilever with a triangular form at the tip using the piezoelectric deployment mode. It is also utilised to examine the Energy Harvester’s mechanical and electrical behaviour. In order to calculate the mesh deformation and to optimise the thickness of the piezoelectric layer, the moving mesh application method is employed. Results from simulations of a rectangular beam with a triangular-shaped tip made of stainless steel as the substrate and lead zirconate titanate (PZT) as the piezoelectric material were obtained. The cantilever’s dimensions are calculated to be 27000 mm by 3000 mm by 200 mm. The outcomes are contrasted against triangular and rectangular shapes. According to the simulation results, the new cantilever structure may create more stress than the triangular and rectangular structures while also improving the stress distribution in the same circumstances. An output voltage of 6.4 mV and a deflection of 100 nm are obtained for a thickness of 200 m. This framework is applicable to wireless sensing devices.